Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Oerlikon Trading Ag, Truebbach (2 from 23 patents)
2. Oerlikon Solar Ag, Trubbach (1 from 7 patents)
3 patents:
1. 8056504 - Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates
2. 7687117 - Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates
3. 7487740 - Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates