Centre National De La Recherche Scientifique

Other

Université Joseph Fourier - Grenoble 1

Metal Process (societe a Responsabilite Limitee)

Centre National D'etudes Des Telecommunications

Etat Francais, Represente Par Le Ministre Des Pos Tes, Destelecommunicati

Societe Responabilite Limite, Metal Process

Université Grenoble Alpes

Centre National De La Recherche Scientifique-cnrs

Boreal Plasmas

Pelletier, Jacques

Jacques Henri Pelletier

Ana Lacoste

Yves Alban-Marie Arnal

Yves A Arnal

Thierry Leon Lagarde

Stéphane Bechu

Michel Moisan

Michel G Pichot

Alexandre Bes

Laurent J Vallier

Maryam Tabrizian

L'Hocine Yahia

Zenon Zakrzewski

Antoine Durandet

Regis Berliet

Claude Pomot

Stephane Jean Louis Bechu

Thierry Léon Lagarde

Jerome Sirou

Thierry L&eacute;on Lagarde

Jean Barbeau

St&eacute;phane Moreau

Jérôme Sirou

Stéphane Jean Louis Bechu

The invention concerns a device and a process, the device being a cleaning device utilizing a dry chemical means assisted by plasma from a reactor () containing an unwanted deposit on its walls and at least one other polarizable surface (), characterized in that it comprises means () for positively polarizing one or each of the polarizable surfaces relative to the reactor walls maintained at a reference potential.

Cleaning device and cleaning process for a plasma reactor

The disclosure includes a coaxial microwave applicator for plasma production, including a coaxial tube formed by a central core and an outer conductor separated from the central core by an annular space allowing propagation of microwaves. The applicator includes: a cylindrical permanent magnet disposed at the end of the central core; and at least one annular permanent magnet disposed at the end of the outer conductor, all of the magnets disposed at the end of the coaxial tube having the same direction of magnetization. The magnetization of the magnets forms a magnetic field suitable for generating, in a zone away from the end of the applicator, an electronic cyclotronic resonance coupling with the electric microwave field of the applicator. The external radius and the magnetization of the annular magnet are selected such that the magnetic field lines generated by the magnets pass through the coupling zone in a direction substantially parallel to the axis of the applicator.

Coaxial microwave applicator for plasma production

The disclosure includes a glow-discharge lamp including: an elongate casing transparent to illuminating radiation and containing a plasma gas; a device for applying an electric field for maintaining a plasma in the so-called positive column region of the casing, the device including two electrodes forming an anode and a cathode located in the casing at each end thereof; and a radio-frequency or microwave cathode plasma source arranged in the casing in relation to the cathode-forming electrode, such as to generate a high-frequency discharge located on the surface of the electrode in order to generate the plasma. The disclosure also includes a lighting method of such a glow-discharge lamp.

Glow discharge lamp

The invention relates to a device for producing and/or confining a plasma, said device comprising a chamber in the space of which the plasma is produced and/or confined, said chamber including a wall defining a housing inside the chamber and encompassing said space, wherein said device is characterized in that it comprises at least one assembly for producing and/or confining plasma, each assembly being composed of magnets having only an axial magnetization direction and being recessed in the wall defining the housing, so that the magnetization direction of all the magnets defining each assembly is substantially perpendicular to the housing defined by the wall and so that the assembly is substantially symmetrical to the housing, wherein the magnetic field lines do not extend through the wall of the chamber. The invention also relates to a method for producing and/or confining a plasma.

Device and method for producing and/or confining a plasma

The invention concerns a device for producing and/or confining a plasma (), comprising a recipient () within the volume of which the plasma is produced or confined, wherein said recipient comprises a wall () defining a lining () at the inside of the recipient and encompassing the volume, characterized in that it comprises at least one annular magnet (), centered around a normal () with respect to the lining, having radial magnetization direction, such that the magnetization direction is significantly perpendicular to said normal to the lining. The invention also concerns a method for producing and/or confining a plasma.

The invention concerns a source supplying an adjustable energy electron beam, comprising a plasma chamber (P) consisting of an enclosure () having an inner surface of a first value (S) and an extraction gate () having a surface of a second value (S), the gate potential being different from that of the enclosure and adjustable. The invention is characterized in that the plasma is excited and confined in multipolar or multidipolar magnetic structures, the ratio of the second value (S) over the first value (S) being close to: D=1/&#x3b2; &#x221a;2&#x3c0;m/mexp (&#x2212;&#xbd;), wherein: &#x3b2; is the proportion of electrons of the plasma P, mthe electron mass, and mis the mass of positively charged ions.

Source for providing an electron beam of settable power

The method comprises the following steps: The invention is applicable to fabricating micron and sub-micron filters.

Method of producing a sheet comprising through pores and the application thereof in the production of micronic and submicronic filters

The invention relates to a device for the production of a plasma () within a housing comprising means for the generation of energy in the microwave spectrum, for the excitation of the plasma, said means comprise at least one basic plasma excitation device with a coaxial applicator () of microwave energy, one of the ends of which is connected to a production source () of microwave energy, the other end () of which is directed to the gas to be excited within the housing. The device is characterised in that each basic plasma excitation device is arranged in the wall () of the housing, each applicator () having a central core () which is essentially flush with the wall of the housing. The central core and the thickness of the wall () of the housing are separated by a space () coaxial to the central core, said space being totally filled, at least at the end of each applicator, by a dielectric material (), such that said material is essentially flush with the level of the wall of the housing.

Device for production of a plasma sheet

A device of a plasma () for confinement of a plasma within a housing (), comprising creation means for creating a magnetic field, said means being a series of permanent magnets () for creation of a magnetic field presenting an alternating multi-polar magnetic structure to the plasma and the magnets () restrict the plasma to a large volume, the magnets begin distributed in a discontinuous around the volume end said magnets () arc discharge, a distance within the housing at a separation from the walls of the housing by means of support shafts (). The changes above have been provided to improve the clarification of the claim language and claims have been amended to correct a typographical error. Since the changes are minor and are intended merely to improve the legibility of the claims, obtaining authorization from application was not viewed as necessary.

Device for confinement of a plasma within a volume

The invention concerns a system including a microwave generator and a rectangular guide connected with the generator. The system is adapted to operate in fundamental (H ) or transverse electrical (TE ) mode, and associated with means providing a standing wave pattern. The system also includes many power connectors arranged in the guide at zones of maximum amplitude for one of the components of the electromagnetic field for splitting the generator power. The power connectors are adjusted so that the sum of their reduced admittance levels brought to the splitter input formed by the guide is in a single unit and many sources, respectively connected to a connector of the guide, via insulating means ensuring a power transmission of the connector to the source without reflecting towards the connector and a device adapting impedance of each source, located downstream of the insulating means, between the latter and associated source.

Power splitter for plasma device

A system and a method for sterilizing objects, in particular medical instruments and accessories, using gas plasma, also called ionized gas. The gases used to form the plasma do not require to exhibit an intrinsic sterilizing activity. The sterilizing properties result from the passage through an electric field generating the plasma, an electric field which is provided by microwaves, a gas stream including oxygen in molecular form (O ) or as a gas element, and atomic or molecular species capable of emitting UV radiation once they have been energized. The system and method provide the advantage of making it possible to treat heat-sensitive and thermolabile objects at temperatures less than 50&deg; C. using gases presenting no risks for the operator.

Low temperature plasma sterilising system and method

The invention provides apparatus having a series of individual plasma excitation devices each constituted by a wire applicator of microwave energy, having one end connected to a source for producing microwave energy and having an opposite end fitted with at least one magnetic dipole for creating at least one surface having a magnetic field that is constant and of intensity corresponding to electron cyclotron resonance, the dipole being mounted at the end of the microwave applicator in such a manner as to ensure that electrons accelerated to electron cyclotron resonance oscillate between the poles so as to create a plasma diffusion zone situated on the side of the dipole that is remote from the end of the applicator, the individual excitation devices being distributed relative to one another and in proximity with the work surface so as to create together a plasma that is uniform for the work surface.

Method of producing individual plasmas in order to create a uniform plasma for a work surface, and apparatus for producing such a plasma

A method of producing a plasma by capacitive discharges between an active electrode and a passive electrode within a sealed chamber at controlled pressure, the passive electrode being placed at a given electric potential while the active electrode is fed with a discharge-maintaining voltage. The active electrode and passive electrode define a separation plane therebetween parallel to the electrodes. According to the method, a multipole magnetic barrier is placed between the electrodes within the sealed chamber, the multipole magnetic barrier producing magnetic field lines extending across the separation plane. Fast electrons accelerated by the active electrode are caused to oscillate between magnetic poles in order to create plasma production and diffusion zones that are situated on either side of a magnetic barrier facing each of the electrodes.

Method of producing a plasma by capacitive-type discharges with a multipole barrier, and apparatus for implementing such a method

The invention relates to a distribution device for distributing microwave power to excite a plasma inside an enclosure. According to the invention, the distribution device includes at least one second applicator of microwave energy to co-operate with a first applicator and an exciter to form at least one excitation triplet in which firstly the first applicator and the second applicator are mounted substantially parallel to each other and are spaced apart by a given amount to define between them a propagation zone for microwave energy, and secondly the exciter is disposed inside the enclosure by being placed relative to the first and second applicators in such a manner that the trajectories of the electrons do not cross the propagation zone, thereby dissociating the propagation zone and the absorption zone.

Device for producing a plasma, enabling microwave propagation and

The invention relates to a plasma excitation device comprising at least one electrically conductive wire applicator fed form an energy source in the microwave range and means for creating a magnetic field and adapted to create at least one surface having a constant magnetic field of a flux density that corresponds to electron cyclotron resonance. According to the invention, the wire applicator includes the means for creating the magnetic field, with the main component thereof being situated in a cross-section of the applicator and extending over at least a fraction of the length of the applicator, said applicator thus constituting an applicator both of a microwave electric field and of a static magnetic field.

Growing community of inventors

Saint Martin d'Heres, France

Jacques Henri Pelletier