Ziv-av Engineering Ltd.

Tokyo Seimitsu (israel) Ltd

Accretech (israel) Ltd.

Tokyo Seimitso (israel) Ltd.

Jacob Karin

Gilad Golan

Amnon Shtein

Arie Shahar

Amir Ziv-Av

Miki Retter

A scanning system for use in inspecting or writing on a substrate minimizes vibrations by applying movement-actuating forces directly between a carriage and a countermass which are both free to move along parallel tracks. Forces for decelerating and accelerating the scanning carriage are preferably applied along a minor part of a length of movement of the carriage. The carriage is then isolated from forces applied parallel to the track while moving along a major part of its length of movement. As a result, the carriage travels smoothly with approximately uniform speed during it's operative pass, without suffering from vibrations introduced by direct closed-loop feedback control.

Scanning mechanism for high-speed high-resolution scanning

An auto-focus method for focusing an optical arrangement of a sub-micron optical system. The optical system includes a head, at least part of the optical arrangement being mechanically connected to the head. The optical arrangement is configured for reading from or writing to a surface of a medium. The head performs a scanning motion relative to the surface. The method includes illuminating at least part of a first viewing region of the surface by the optical arrangement while performing a focus range measurement of a second viewing region of the surface. The method also includes providing relative movement between the medium and the head in order for the optical arrangement to illuminate at least part of the second viewing region. The method additionally includes adjusting the focus of the optical arrangement based upon the focus range measurement.

Auto-focus method for a scanning microscope

A Cartesian scanning system for scanning a surface of a sample. The scanning system includes a light source assembly configured to produce at least one collimated beam of light, a light sensing system, a stage configured for mounting the sample thereon and a linear track having a direction of elongation. The linear track and the stage are configured to move relative to each other. The scanning system also includes a scanning head having a reflecting system which is configured to direct the collimated beam of light onto the surface and to direct a beam of light reflected from the surface to the light sensing system. The scanning head is slidably associated with the linear track so as to be moveable in a direction parallel to a direction of elongation of the linear track. Also included are a position determination system and a scan displacement correction system.

Cartesian scanning system

A method to compare similar physical areas of an inspection area using a scanning arrangement. The inspection area has a periodic pattern having a repeat vector. The scanning arrangement has a stage, a drive mechanism and at least one circular scanner. The circular scanner has a scanning head and an axis of rotation about which the scanning head performs a circular scanning motion. The drive mechanism is configured to provide relative movement between the stage and the axis of rotation. The method includes the steps of: scanning the inspection area by a combination of circular scanning of the scanning head and by generating relative movement between the stage and the axis of rotation such that pairs of curved scanning paths are related by an integer multiple of the repeat vector; and comparing at least one of said pairs of the curved scanning paths by a pixel to pixel comparison.

Growing community of inventors

Ramat Gan, Israel

Jacob Karin