Samsung Electronics Co., Ltd.

New Power Plasma Co., Ltd.

Dandan Co., Ltd.

Ja-Woo Lee

Yeon-taek Oh

Soo-Sang Yang

Yun-sik Yang

Sun-Ho Kim

Soon-im Wi

Eung-Su Kim

Jang-Hyoun Youm

Seung-Won Shin

Kang-Ho Lee

Su-Ho Lee

Heok-Jae Lee

Yong-Kwun Lee

Keon-Woo Kim

Jung-hyun Cho

Youn-Baek Lee

Bo-Ra Yoon

Sang-jean Jeon

Hyan-Jung Lee

Sun-uk Kim

Tae-Il Cho

Moo-jin Kim

Jang-kyu Choi

Chung-huan Jeon

Kwang-young Jung

A lift pin assembly includes a lift pin having a first longitudinal axis substantially parallel with a first direction, a pin connection block combined with a lower end portion of the lift pin and including a first guide recess in a lower end portion of the pin connection block, the first guide recess extending in a second direction substantially perpendicular to the first direction, and a lift pin holder having a second longitudinal axis substantially parallel with the first direction and including a first sliding portion to be received movably in the second direction within the first guide recess by an eccentricity distance of the second longitudinal axis from the first longitudinal axis when the lift pin holder is connected to the lower end portion of the pin connection block.

Lift pin assembly, substrate support apparatus and substrate processing apparatus having the same

A first edge ring is removed from a substrate support within a process module using a transfer robot. The transfer robot is then used to place a second edge ring on the substrate support. An image sensor (e.g., a disk-shaped wireless image sensor) is positioned over the second edge ring using the transfer robot. The image sensor generates image information, which is analyzed to determine alignment of the second edge ring.

Apparatus and methods for edge ring replacement, inspection and alignment using image sensors

A remote plasma generator includes a body, a driver, and a protection tube. The body includes a gas injection port, a plasma exhaust port, and a plasma generation pipe through which discharge gas or plasma flow. The driver is coupled to the body and generates a magnetic field and plasma in the body. The protection tube is at an inner side of the plasma generation pipe to protect the plasma generation pipe from plasma.

Remote plasma generator using ceramic

A charging apparatus used with a mobile robot has an improved charging structure so that a mobile robot is easily brought into electrical contact with a charging unit, thereby reducing manufacturing costs and preventing a charging failure. The charging unit is provided with a plurality of charging terminals which are brought into electrical contact with corresponding ones of contact terminals of the mobile robot. Each of the charging terminals includes a body and a head. A contact plate is mounted to a predetermined portion of the head to be brought into electrical contact with a corresponding one of the contact terminals.

Charging apparatus used with a mobile robot

A two-legged walking robot includes a pair of foot members a calf member provided above each foot member, a double-axis ankle joint provided between the foot member and the calf member to allow the foot member to rotate relative to the calf member in forward and backward directions and in right and left directions. The robot also includes a femoral member provided above each calf member, a single-axis knee joint provided between the calf member and the femoral member, a hip member provided above the femoral member, and a double-axis hip joint provided between the femoral member and the hip member to allow the femoral member to rotate relative to the hip member in the forward, backward, right, and left directions. Thus, the two-legged walking robot operates similar to a human ankle, knee and hip.

Two-legged walking robot

Growing community of inventors

Hwaseong-si, South Korea

Ja-Woo Lee