Samsung Electronics Co., Ltd.

Ja Meyung Kim

Beom Suk Lee

Jong Eun Park

Dong Mo Im

Kwan Sik Cho

An image sensor includes a substrate, a photoelectric conversion region disposed inside the substrate, a first active region disposed inside the substrate to include a ground region, a floating diffusion region, and a channel region for connecting the ground region and the floating diffusion region, a substrate trench disposed inside the channel region, a transfer gate disposed on a face of the substrate to include a lower gate which fills a part of the substrate trench and has a first width, and an upper gate having a second width smaller than the first width on the lower gate, and a gate spacer disposed inside the substrate trench to be interposed between the ground region and the upper gate.

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SEOUL, South Korea

Ja Meyung Kim