Medical University of South Carolina

J Russell Terry

Krishna Mandal

A detection device, along with methods of its manufacture and use, is provided. The detection device can include: a SiC substrate defining a substrate surface cut from planar to about 12&#xb0;; a buffer epitaxial layer on the substrate surface; a n-type epitaxial layer on the buffer epitaxial layer; and a top contact on the n-type epitaxial layer. The buffer epitaxial layer can include a n-type 4H&#x2014;SiC epitaxial layer doped at a concentration of about 1&#xd7;10cmto about 5&#xd7;10cmwith nitrogen, boron, aluminum, or a mixture thereof. The n-type epitaxial layer can include a n-type 4H&#x2014;SiC epitaxial layer doped at a concentration of about 1&#xd7;10cmto about 5&#xd7;10cmwith nitrogen. The top contact can have a thickness of about 8 nm to about 15 nm.

Growing community of inventors

Los Alamos, NM, United States of America

J Russell Terry