Pri Automation, Inc.

J Rafael Gomez

Rodney C Ow

Martin P Aalund

Steve Reyling

Lang Van Nugyen

Craig Chidlow

Steven J Remis

A substrate handling system with integrated door removal assembly for an environmentally controlled substrate processing chamber is provided. The system includes a robot positioned within the chamber. A drive mechanism is connected to the robot. A door interface mechanism is attached to the drive mechanism and includes a door key and a door key control assembly. The drive mechanism provides mechanical control of the door key control assembly such that that door key is manipulated to couple a substrate carrier door to a port door. The coupled doors are storable within the chamber or on the robot. The drive mechanism may also include a substrate end effector, thereby allowing the robot to transport substrates within the chamber. The robot is movable within the chamber to multiple processing stations.

Growing community of inventors

Mountain View, CA, United States of America

J Rafael Gomez