Brewer Science, Inc.

J Michael Mori

Terry Lowell Brewer

James E Lamb, Iii

James F Lamb

A photolithographic composition having improved processability and which eliminates the need for interlayering multiple special purpose coatings in the production of microelectronic devices is surprisingly made possible by selective dissolution of a polymer and an effective light attenuating material in critical solvents. The polymers which are used in the present invention include homopolymers and copolymers of poly(vinylpyridine).

Method of manufacturing microelectronic devices having multifunctional

A photolithographic composition having improved processability and which eliminates the need for inter layering multiple special purpose coatings in the production of micro-electronic devices is surprisingly made possible by selective dissolution of poly(vinylpyridine) and an effective light attenuating material in critical solvents.

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Rolla, MO, United States of America

J Michael Mori