Saint-gobain Abrasives, Inc.

Saint-gobain Abrasives Technology Company

Saint-gobain Abrasifs

Valenite, Inc.

J Gary Baldoni

Sergej-Tomislav V Buljan

Srinivasan Ramanath

Richard M Andrews

Earl G Geary, Jr

Douglas H Shaw

Taewook Hwang

Eric M Schulz

Thomas Puthanangady

Stephen L Bennett

A study of several key conditioner design parameters has been conducted. The purpose was to improve conditioner performance by considering factors such as wafer defects, pad life, and conditioner life. For this study, several key conditioner design parameters such as diamond type, diamond size, diamond shape, diamond concentration and distribution, were selected to determine their effect on CMP performance and process stability. Experimental validations were conducted. Conditioner specifications were matched to each specific CMP environment (intended application) in order to improve process stability and CMP performance particularly for emerging technology nodes. Several conditioner designs were developed and run successfully in the field. Significant planarity improvement for a 300 mm CMP process was achieved in accordance with one embodiment, and an increase of pad life and wafer polish rate was simultaneously achieved with another embodiment.

Optimized CMP conditioner design for next generation oxide/metal CMP

A drum grinding wheel includes an elongated drum configured for coaxial engagement with a spindle of a grinding machine. An exterior surface of the drum extends parallel to a central axis, and a plurality of removable cutters are removably fastened to the exterior surface. Each of the cutters has a plurality of ribs disposed in spaced relation thereon, and abrasive grain is disposed on a grinding face of each of the ribs, such as by use of a metallic braze.

Drum grinding wheel

A process for metal coating diamond superabrasive particles involves heating the superabrasive particles in the presence of coat-forming powder of a metal compound under a common inert atmosphere. The metal compound contains a metal which can be thermochemically reduced by the superabrasive substance serving as the reducing agent. The process forms a chemical bond at the interface between the outer metal layer and the superabrasive particle substrate. The metal coated superabrasive particles can be hydrogen treated in situ and separated from excess coat-forming powder easily by filtration. The product particles are ideal for use in a wide variety of metal bonded cutting, machining, dressing and other abrasive tools, especially diamond film insert and single layer diamond tools.

Article of superabrasive coated with metal

Process for coating superabrasive with metal

A process for producing a ceramic-metal composite body exhibiting binder enrichment and improved fracture toughness at its surface. The process involves forming a shaped body from a homogeneous mixture of: (a) about 2-15 w/o Co or about 2-12 w/o Ni binder, (b) excess carbon, (c) optionally, 0 to less than 5.0 v/o B-1 carbides, and (d) remainder tungsten carbide. The mixture contains sufficient total carbon to result in an ASTM carbon porosity rating of C06 to C08 at the core of the densified body. The weight ratio of excess carbon to binder is about 0.05:1 to 0.037:1. The shaped body is densified in a vacuum or inert atmosphere at or above about 1300.degree. C. and slow cooled, at least to about 25.degree. below the eutectic temperature. Alternatively, the sintered body may be cooled to a holding temperature at or slightly above the eutectic temperature, isothermally held for at least 1/2 hr, and further cooled to ambient. The core zone of the resulting densified body exhibits an ASTM carbon porosity rating of about C02-C08, while its surface zone exhibits an ASTM carbon porosity rating of about C00. The surface zone has an outer surface layer enriched in binder content to a depth of about 5-200 .mu.m, improving the surface fracture toughness of the body. Sintering temperature and pressure may be tailored to produce efficiently either a tool suitable for coating or a tool suitable for brazing.

Surface-toughened cemented carbide bodies and method of manufacture

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Norfolk, MA, United States of America

J Gary Baldoni