Siemens Aktiengesell Schaft

Forschungszentrum Karlsruhe Gmbh

Karlsruher Institut Fur Technologie

Carl Mahr Holding Gmbh

Jürgen Mohr

Elena Reznikova

Eckhard Hempel

Wolfgang Osten

Aiko Ruprecht

Peter Lehmann

Martin Wilfried Börner

Vladimir Nazmov

Joachim Schulz

Hartmut Kumm

Peter Lücke

Carlos Javier Moran-Iglesias

Sven Schönfelder

Franz Pfeiffer

Markus Simon

Arndt Last

A grating with a large aspect ratio is disclosed, in particular to be used as an X-ray optical grating in a CT system and in particular produced by a lithography method. In at least one embodiment, the grating includes a multiplicity of recurring alternating grating webs and grating gaps with a height, and a multiplicity of filler beams, respectively arranged in the grating gaps with a spacing from one another in the direction of the gaps, which beams connect respectively adjacent grating webs over their height. In at least one embodiment, the grating webs and the grating gaps run from a first to a second side of the grating, and a filler beam has a width in the direction of the gaps and this width is at most 10% of the spacing between two adjacent filler beams. In at least one embodiment, the spacings between respective adjacent filler beams in a grating gap do not vary by more than 10% in the entire grating. At least one embodiment of the invention furthermore relates to a CT system containing at least one grating according to at least one embodiment of the invention.

Grating with a large aspect ratio, in particular to be used as an X-ray optical grating in a CT system, produced by a lithography method

A measuring head () according to the invention comprises the combination of a zone lens (), which is preferably a diffractive lens, with a hemispherical lens () or a GRIN lens (). This represents a concept capable of miniaturization, resulting in very slender measuring heads () having a high numeric aperture and, accordingly, leads to the best resolution capacity. Such measuring heads are insensitive to angular errors as concerns the orientation of the measuring head to the surface to be measured or to an oblique positioning of the surface relative to the optical axis of the measuring head.

Optical measuring head

In an x-ray lens for focusing x-rays over a large energy range wherein the lens comprises a large number of lens elements, the lens elements have a quasi-parabolic profile Y(x) according to the equation()=/2[(())]Wherein x represents the parabola axis, l/2r represents the half parameter of the parabola and f(x) represents a function different from zero.

X-ray lens

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Sulzfeld, Germany

Jürgen Mohr