Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla-tencor Technologies Corporation (1 from 641 patents)
1 patent:
1. 7566873 - High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus