Fujikin Inc.

Kabushiki Kaisha Fujikin

Izuru Shikata

Kazunari Watanabe

Mutsunori Koyomogi

Taiji Chiba

Michio Yamaji

Tsutomu Shinohara

Takahiro Matsuda

Ryutaro Tanno

Hisatoshi Akamoto

Shinya Nojima

Megumu Makino

Tomohiro Hashizume

Ryuji Yogo

Toshiyuki Inada

Kenta Kondo

Kenji Tsubota

Shigeaki Tanaka

Ichiro Mine

Shunya Ikeda

Koichi Yuhara

Masamori Tsukada

Jubee Aizawa

Tsuneo Yoshida

A method of forming a pipe joint includes: preparing a first pipe member, a second pipe member, a casing, and a pressing member to be arranged in the casing to press a second flange portion of the second pipe member against a first flange portion of the first pipe member, the casing having a first opening, a second opening, a third opening, a flange receiving space, and a receiving space in communication with the flange receiving space and adapted to receive the pressing member; inserting the first pipe member from the second opening toward the first opening until the first flange portion comes to rest within the flange receiving space; inserting the second pipe member into the second opening with the second flange portion ahead until the second flange portion comes into contact with the first flange portion.

Method of forming a pipe joint, pipe joint component, and pipe joint, fluid control device, fluid control unit and semiconductor fabrication apparatus including the pipe joint component

A valve device has a valve main body and a tube fitting that has an air passage for supplying operation air into the valve main body. An upper lid portion of a cap is formed with a fitted hole provided with a projection. The tube fitting has a fitting portion to be fitted into the upper lid portion. The fitting portion is formed with, on an outer circumference thereof, a fitting groove to which the projection is fitted, and has a tip end portion located closer to a tip end side than the fitting groove.

Valve device, fluid control apparatus, and semiconductor manufacturing apparatus

The radius of curvature (SR2) of a surface of a diaphragm presser, which surface is in contact with a diaphragm, is at least 30 mm. The taper angle (&#x3b8;) for a lower surface of a press adapter is no more than 10&#xb0; relative to a flat portion of a bottom surface of a depression of a body.

Diaphragm valve, fluid control device, semiconductor manufacturing apparatus, and semiconductor manufacturing method

Valve

A diaphragm valve includes a valve body, a diaphragm, a bonnet, an operation mechanism, and a fixing mechanism. The fixing mechanism includes a clamping member for integrally sandwiching and fixing, from both right and left sides, circumferential edges of both the bonnet and the valve body. A circular pressing member for pressing a circumferential edge of the diaphragm from above is interposed between the diaphragm and the bonnet and has convex portions and concave portions. The convex portions fit into notches provided at the circumferential edge of the diaphragm or the valve body, and the concave portions are fitted by protrusions provided at the circumferential edge of the diaphragm or the valve body.

Diaphragm valve

Provided are a valve device free of changes in the position of the valve member caused by external force and fluid pressure, and a lock device for the valve device. The lock device has a tubular member fitted to the rotating part of the valve device so that the member is movable along the axis of the rotating part in both directions, wherein the member has a protrusion on its inner circumferential face along its axis, and the protrusion engages with or disengages from recesses in an outer circumferential face of a holder of the rotating part formed along its axis when the member moves in either direction; or the member has recesses in its inner circumferential face formed along its axis, and the recesses engage with or disengage from a protrusion on the outer circumferential face of the holder along its axis when the member moves in either direction.

Lock device and valve device

Provided is a fluid control device which can shorten an assembling time by facilitating positioning of a line support member and can suppress the increase of a height of a portion which supports fluid control equipment. A base member is formed in a rectangular frame shape by an upper lateral frame member, a lower lateral frame member, and left and right longitudinal frame members which are orthogonal to the upper and lower lateral frame members. A positioning portion for positioning each line support member is provided to the respective lateral frame members. Upper and lower end portions of each line support member are clamped between the respective lateral frame members and upper and lower cover members detachably mounted on the base member in a state where the upper and lower end portions of each line support member are positioned by the positioning portions provided to the respective lateral frame members.

Fluid control device

A fluid draw-off block joint includes an inlet channel, an outlet channel, and a closure portion. The inlet channel has a first end communicating with an outlet channel of a single-line block joint, and a second end communicating with an inlet channel of an outlet on-off valve. The outlet channel has a first end communicating with an outlet channel of the outlet on-off valve, and a second end being open through a side surface in a line exit direction. The closure portion closes an opening of a bifurcated channel of a plural-line block joint.

Fluid control apparatus joint, and fluid control apparatus

Provided is a diaphragm valve that can improve durability when the diaphragm valve is downsized. In a pressing adaptor, a whole lower surface thereof has a taper shape at a predetermined inclination angle. A bottom surface of a depression of a body has a circular flat portion and a depression that is continued to an outer circumference of the flat portion and is depressed with respect to the flat portion. In a diaphragm, in a state where a fluid inflow channel is opened, an upper surface of an outer circumferential edge portion comes into surface contact with the taper-shaped lower surface a of the pressing adaptor, and a lower surface of the outer circumferential edge portion comes into line contact with the outer circumference of the flat portion of the bottom surface of the depression of the body.

A purge line changing block joint for enabling supply of different types of purge gas between lines without a significant remodeling of a fluid control apparatus and the fluid control apparatus is provided. A purge line changing block joint is connected to an upper side of a three-way valve channel portion in at least one line of the plurality of lines. The purge line changing block joint includes a process gas inlet channel communicating with a process gas inlet channel of the three-way valve channel portion, an outlet channel communicating the process gas inlet channel and an outlet channel of the three-way valve channel portion, a channel terminal not in communication with a purge gas inlet channel of the three-way valve channel portion but terminating the same, and a new purge gas inlet channel communicating with the outlet channel and opening on the top surface.

Purge line changing block joint and fluid control apparatus

A fluid coupling reliably finding absence of the gasket, if exists, in the leak test is provided. Butted end surfaces of coupling members have annular sealing protrusions and anti-overfastening annular protrusions protruded further than the annular sealing protrusions, respectively. At least one of the anti-overfastening annular protrusions has a communication path communicating internal space with external space when both the anti-overfastening annular protrusions butt against each other.

Fluid coupling

The ball valve may be manually opened and dosed with ease and securely prevent leakage. The ball valve includes a valve body having a fluid inlet passage, fluid outlet passage, and a communicating part provided between these passages. The ball valve includes a ball having a fluid communication passage and preferably is arranged on the communicating part of the valve body for rotating about a reference axis. A substantially cylindrical ball seat which preferably has a desired opening part on its peripheral wall and is arranged between the ball and valve body. The ball valve includes a ball seat pressing part inside the valve body, adjacent to the ball seat and a presser screw screwed into the inner periphery of the valve body. The presser screw preferably presses the ball seat pressing part by adjustment of its tightening force and presses the ball seat pressing part without contacting the packing.

Ball valve

A pressure sensor apparatus which can provide an integrated fluid control apparatus in which a pressure sensor is easily replaced independently, as well as achieving a more compact structure, and a pressure sensor built-in fluid control equipment. A pressure sensor apparatus () includes a first passage block () in which a predetermined passage () is formed, a second passage block () in which a predetermined passage () is formed and which opposes to the first passage block () at a predetermined interval, and a pressure sensor () which is provided in an opposing surface of any one of the first and second passage blocks () and detects a fluid pressure in an inner passage (), and is integrated in a pressure regulator ().

Growing community of inventors

Osaka, Japan

Izuru Shikata