Hitachi Electronics Engineering Co., Ltd.

Hitachi-high-technologies Corporation

Hitachi High-tech Electronics Engineering Co., Ltd.

Izuo Horai

Yuta Urano

Takahiro Jingu

Takayuki Ishiguro

Kazuya Tsukada

Hirokazu Koyabu

Mitsuyoshi Koizumi

Toshihiro Kimura

Kenji Aikou

Noboru Kato

Kyoichi Mori

An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.

Inspection method and inspection device

An optical inspection unit inspects a surface of an object under inspection optically. A processing unit detects defects on the surface of the object under inspection and their features according to inspection results from the optical inspection unit, detects positions of the detected defects on the surface of the object under inspection, and classifies the detected defects according to their features. The processing unit selects the defects, on which a X-ray analysis should be performed, according to predetermined conditions about the features or the classification results of the defects. Alternatively, the processing unit displays the positions and the classification results of the defects, and an operator picks the defects, on which the X-ray analysis should be performed. A X-ray inspection unit performs the X-ray analyses on the selected or picked defects.

Surface inspection method and surface inspection apparatus

A magnetic disk testing method is provided, which comprises a surface defect test step of detecting, as defect data, the size of surface defect of a magnetic disk, the continuity thereof, the number thereof and the position thereof by testing magnetic disks optically and a classification step of classifying the magnetic disks to first magnetic disks, second magnetic disk and third magnetic disks on the basis of the defect data obtained in the surface defect test step. The first magnetic disks have surface defects which do not provide any problem on electric characteristics and are to be qualified through a subsequent certification test, the second magnetic disks require a further certification test for determining whether or not the surface defects thereof provide a problem on electric characteristics and the third magnetic disks have electric characteristics which are to be clearly disqualified without necessity of a further certification test, wherein the first magnetic disks are decided as qualified and the second magnetic disks are objects for the certifying test.

Magnetic disk testing method and surface defect testing device

The surface defect test method and tester according to the invention comprises a sensitivity calibration disk formed with n (n is an integer equal to or larger than 2) false defect rows each including 3 or more false defects each formed in a radial or peripheral direction provided in the peripheral direction of the calibration disk at a predetermined angle pitch. The false defects of each false defect row take in the form of protrusions or recesses having substantially the same size, adjacent ones of the false defects are physically separated by a predetermined distance larger than a width of a laser spot and the false defects of a certain one of the false defect rows are different in size from the false defects of other false defect rows, regulating the detection sensitivity according to a result of the test, producing, from a result of a test of the calibration disk with the regulated detection sensitivity, data relating a level of a detection signal to a size of the false defect as a reference data for determination of the size and obtaining the size of the defect from the level of the detection signal when the disk to be tested on defect on the basis of the reference data for determination of the size.

Surface defect test method and surface defect tester

A calibration disk for calibrating a sensitivity of a surface defect tester, according to the present invention, comprises n (n is an integer equal to or larger than 2) false defect rows each including 3 or more false defects each formed in a radial or peripheral direction provided in the peripheral direction of the calibration disk at a predetermined angle pitch. The false defects of each false defect row take in the form of protrusions or recesses having substantially the same size, adjacent ones of the false defects are physically separated by a predetermined distance larger than a width of a laser spot and the false defects of a certain one of the false defect rows are different in size from the false defects of other false defect rows.

Sensitivity calibration disk for surface defect tester

An apparatus for detecting extraneous substances on a glass plate includes a first light projecting system arranged above a plane under examination on a glass plate, the surface of which is irradiated with an S-polarized laser beam at a first elevation angle, a second light projecting system arranged above the surface thereof which is irradiated with a P-polarized laser beam at a second elevation angle greater than the first elevation angle, and a light receiving system for receiving scattered light from the surface irradiated with the laser beams respectively emitted from the first and the second light projecting system at an elevation angle smaller than the first elevation angle. The light receiving system is arranged on a side opposite to the direction of irradiation with the normal line set up at the laser beam irradiation point therebetween and the output level of the P-polarized laser beam is set in specific relation to the S-polarized laser beam.

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Odawara, Japan

Izuo Horai