Average Co-Inventor Count = 1.14
ph-index = 12
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (22 from 10,341 patents)
22 patents:
1. 9103029 - Processing apparatus and film forming method
2. 8833298 - Film forming apparatus
3. 7762809 - Heat treatment apparatus
4. D616393 - Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
5. D616392 - Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
6. D616396 - Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
7. D616391 - Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
8. D616390 - Quartz cover for manufacturing semiconductor wafers
9. D616394 - Support of wafer boat for manufacturing semiconductor wafers
10. D616395 - Support of wafer boat for manufacturing semiconductor wafers
11. D615937 - Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
12. D615936 - Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
13. D601979 - Pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers
14. D600660 - Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers
15. D600220 - Heat radiation fin of heat insulating cylinder for manufacturing semiconductor wafers