Tokyo Electron Limited

Iwao Kumasaka

Koji Kubo

Satoshi Tochiori

Yuji Tsunoda

Hiroshi Shimatani

Yuichi Higuchi

Toshihiro Takashima

Makoto Suzuki

Kazuhiko Usui

By dividing a range within which a control device can be operated into a plurality of hierarchical operating levels corresponding to levels of different users of that control device, and inputting information such as the name and password of each of these users, the present invention makes it possible to set an operating level corresponding to each of these users. Once an operating level is set, an operating portion is configured to disable the operation of the control device in an operating range that exceeds this operating level. The configuration is such that switch portions of the operating panel are allocated to a certain operating level, but switch portions relating to operating levels other than the currently set operating level are disabled.

Operating system for fabrication apparatus

Substrate treatment equipment and method with testing feature

One lot is a group of wafers-to-be-processed in one wafer carrier, and one lot region for one lot is allocated fixed to a holding region of a wafer boat. A variable lot region mode in which lot regions for 4, for example, lots are allocated to the wafer boat. When a lot number is less than 4, or numbers of sheets of wafers-to-be-processed in the respective lots are less than a prescribed number, the lot regions can be compressed, centered on a number of a set holding groove is prepared. On the other hand, in connection with transfer of monitor wafers, a mode in which monitor wafers are transferred to inter-lot regions, and a mode in which numbers of holding grooves can be designated are prepared. The former mode is selected in product monitor, and the latter mode is selected in apparatus monitor. The fixed lot region mode in which the respective lots correspond to their holding regions irrespective of numbers of sheets of wafers in the carriers, and the variable lot region mode in which wafers-to-be-processed are transferred to both sides of a designated number of holding groove can be selected by switches. The fixed lot region mode includes a first fixed lot region mode in which wafers-to-be-processed are held in the same arrangement as in the respective carriers, and a second fixed lot region in which wafers-to-be-processed are held without a vacant stage therebetween in respective lot regions. According to the present invention, because of the above-described constitutions, a heat treatment apparatus for heat treating a number of semiconductor wafers, for example, a vertical heat treatment apparatus, can have high freedom degree in arranging wafers-to-be-processed in the wafer boat, and the semiconductor wafers can be transferred suitably in accordance with kinds of heat treatments.

Heat treatment apparatus

The invention relates to a teaching method for instructing relative proximity locations to a loading arm that is used for loading objects to be processed in to or out of a support boat, the support boat being provided with a plurality of support portions for supporting the objects to be processed at a predetermined pitch along the length thereof. With this teaching method the loading arm is moved manually into the vicinity of one of the plurality of support portions that is positioned at an uppermost end of the support boat, a support portion positioned at a lowermost end thereof, and at least one support portion other than the two support portions; obtaining three-dimensional coordinates thereof; and these three-dimensional coordinates are stored in a storage portion. The three-dimensional coordinates for each of the others of the support portions are then derived on the basis of these stored values. This makes it possible to accurately derive the three-dimensional coordinates of all of the support portions in practice, even at locations where the boat itself has become deformed.

Teaching method for loading arm for objects to be processed

An operation control device for use in an electric power supply system for supplying electric power from one electric power source to a plurality of electric power consuming systems, which can determine based on an outside signal whether or not the electric power consuming systems can proceed to operations includes an output electric power detecting unit for detecting electric power outputted by the electric power source; and a comparison control unit for comparing a detected value of the output electric power detecting unit with a preset reference value to output a comparison signal indicative of a result of the comparison as the outside signal to be supplied to the plural electric power consuming systems. The comparison signal indicating an inoperable state when the detected value exceeds the reference value, whereby the electric power consuming systems are permitted to proceed to steps of their operations or stand by. As a result, a plurality of electric power systems can be efficiently administered in consideration of a total electric power consumption amount.

Growing community of inventors

Aiko-Gun, Japan

Iwao Kumasaka