Asml Netherlands B.v.

Ivo Matteo Leonardus Weijden

Roy Werkman

Cornelis Johannes Henricus Lambregts

Theo Wilhelmus Maria Thijssen

Jeroen Van Dongen

Erik Mathijs Maria Crombag

Maria Helena Schut

Erwin Riemens

Ruud Rudolphus Johannes Catharinus De Wit

Menno Meeldijk

Hans Marinus Struijs

A method for determining a preferred control strategy relating to control of a manufacturing process for manufacturing an integrated circuit. The method includes: obtaining process data associated with a design of said integrated circuit; and obtaining a plurality of candidate control strategies configured to control the manufacturing process based on the process data, each candidate control strategy including an associated cost metric based on an associated requirement to implement the candidate control strategy. A quality metric related to an expected performance of the manufacturing process is determined for each candidate control strategies, and a preferred control strategy is selected based on the determined quality metrics and associated cost metrics for each candidate control strategy.

Method for evaluating control strategies in a semiconductor manufacturing process

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Eindhoven, Netherlands

Ivo Matteo Leonardus Weijden