Praxair S.t. Technology, Inc.

Praxair Technology, Inc.

Ivan Ward

Joseph C Facey

Paul S Gilman

Holger J Koenigsmann

A method for aligning the sputter target onto a backing plate having a peripheral arcuate-shaped flange on its bonding surface to provide an aligned and uniform solder bonded interface; and the sputter target/backing plate assembly so produced.

Sputter target and backing plate assembly

Method for centering a sputter target onto a backing plate and the assembly thereof

Provided is a method of forming ferromagnetic sputter targets and sputter target assemblies having a uniform distribution of magnetic leakage flux. The method includes providing a ferromagnetic sputter workpiece and hot rolling the workpiece to a substantially circular configuration sputter target; machining a taper in a surface of the sputter target to have a thickness gradient of the sputter target, where the center of the sputter target is about 0.020 to about 0.005 inches thinner than the edge of the sputter target, and where the magnetic leakage flux across the sputter target is uniformly distributed.

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Nanuet, NY, United States of America

Ivan Ward