Average Co-Inventor Count = 4.20
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. L'air Liquide, Société Anonyme Pour L'etude Et L'exploitation Des Procédés Georges Claude (2 from 1,433 patents)
2 patents:
1. 11482414 - Ultra-low temperature ALD to form high-quality Si-containing film
2. 9633838 - Vapor deposition of silicon-containing films using penta-substituted disilanes