Fei Comapny

Ivan Lazic

Eric Gerardus Theodoor Bosch

Bart Jozef Janssen

Gijs Van Duinen

Peter Christiaan Tiemeijer

Bart Buijsse

Faysal Boughorbel

Brian Routh, Jr

Erik Michiel Franken

Uwe Luecken

Ali Mohammadi-Gheidari

Sorin Lazar

David Foord

Eric Gerardus Bosch

Kasim Sader

Robert Imlau

Ross Savage

Stephanus Hl Van Den Boom

Thomas Miller

Van Gerard Nicolaas Anne Veen

Eric Bosch

Steijn Van Den Boom

A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps:

Discriminative imaging technique in scanning transmission charged particle microscopy

Intelligent pre-scan in scanning transmission charged particle microscopy

A method of performing sub-surface imaging of a specimen in a charged-particle microscope of a scanning transmission type, comprising the following steps:

Method of performing tomographic imaging in a charged-particle microscope

An example method of imaging a specimen in a Scanning Transmission Charged Particle Microscope may include scanning a beam of charged particles across a specimen, detecting, by a segmented detector, a flux of charged particles traversing through the specimen at each scan location, for each scan location, combining detection data from different segments of the detector to produce a respective vector output, forming, based on the respective vector output data for each scan location, an imaging vector field, forming, based on the imaging vector field, an integrated vector field image, and reducing error in either the imaging vector field prior to forming the integrated vector field image or correcting the integrated vector field image, wherein the error is due to pointwise variations in beam incidence angle on the specimen.

Imaging technique in scanning transmission charged particle microscopy

A method is presented for sub-surface imaging of a specimen in a charged particle microscope. A series of images, with individual members Iis collected, with a value of a beam parameter P varied for each image, thereby compiling a measurement set M={(In, Pn)}, with P being the focus position along the charged particle axis. The data for the images are recorded using signals from a segmented detector. The signals from segments combined and compiled to yield a vector field. Mathematical processing then deconvolves the vector field, resulting in depth-resolved imagery of the specimen.

A method and apparatus for ptychographic imaging is described. Typically a high number of pixels (after binning) is needed to obtain a high quality reconstruction of an object. By using calculation planes with more nodes (for example 512&#xd7;512 nodes) than the number of pixels of the detector, a high quality reconstruction of an object can be made, even when using for example a 16 segment detector, or a 32&#xd7;32 pixel detector. Although the reconstructed object shows less resolution ('sharpness'), all features are there.

Method of ptychographic imaging

Examining a sample in a charged-particle microscope of a scanning transmission type includes:

Method of examining a sample in a charged-particle microscope

A method of investigating a wavefront of a charged-particle beam that is directed from a source through an illuminator so as to traverse a sample plane and land upon a detector, an output of the detector being used in combination with a mathematical reconstruction technique so as to calculate at least one of phase information and amplitude information for the wavefront at a pre-defined location along its path to the detector, in which method:

Method of investigating the wavefront of a charged-particle beam

A system of investigating aberrations in a charged particle lens system, wherein a charged particle beam is directed from a multitude of directions through a pivot point on a sample stage. An image figure is recorded for each of multiple focus settings at each beam direction setting, creating a set of registered images. This set of images is compared to reference images to derive aberrations present in the lens system without the use of an amorphous sample present.

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Eindhoven, Netherlands

Ivan Lazic