Sony Corporation

Itaru Suzuki

Etsuro Ikeda

Kaoru Nakajima

Yuji Kawana

Hajima Yano

Hiroyuki Wakasugi

A DC sputtering system improved in prevention of fusion of a substrate and electric corrosion of a pallet revolving shaft due to the flow of negative electric charges at the time of production of an optical disk. The system includes a pair of electrodes, a negative electrode and a positive electrode, wherein the negative electrode is composed of a target plate made from a target material such as Si and a backing plate on which the target plate is fixedly placed, and the positive electrode is composed of a pallet disposed opposite to the negative electrode. A substrate of an optical disk is mounted on the positive electrode side through a disk base using an inner peripheral mask and an outer peripheral mask. Each of the inner peripheral mask and the outer peripheral mask is made from or covered with an electrically insulating material such as teflon or ceramic. This prevents the flow of negative electric chargers from being concentrated at the inner peripheral mask and the outer peripheral mask, to thereby protect the substrate from being fused.

DC sputtering system

A magneto-optical disc system and a medium used therewith are disclosed in which a magneto-optical disk having a magneto-optical recording layer on one major surface with a protective film formed on said magneto-optical recording layer, on which a magnetic head is slid, and an optical system having a focus servo mechanism on the other surface. The focus servo mechanism of the optical system satisfies a certain condition to avoid any focal blank.

Growing community of inventors

Miyagi, Japan

Itaru Suzuki