Hamamatsu-photonics K.k.

Itaru Mizuno

Minoru Niigaki

Minoru Kondo

Shoichi Uchiyama

Yasufumi Takagi

A light-emitting body of rapid speed of response and high light emission intensity, and an electron beam detector, scanning electron microscope and mass spectroscope using this are provided. In the light-emitting bodyaccording to the present invention, when fluorescence is emitted by a nitride semiconductor layerformed on one faceof a substratein response to incidence of electrons, at least some of this fluorescence is transmitted through this substrate, whereby that fluorescence is emitted from the other faceof the substrate. The response speed of this fluorescence is not more than &#x3bc;sec order. Also, the intensity of emission of this fluorescence is almost identical to that of a conventional P47 phosphor. Specifically, with this light-emitting body, a response speed and light emission intensity are obtained that are fully satisfactory for application to a scanning electron microscope or mass spectroscope. In addition, a cap layercontributes to improvement in the persistence rate of light emission in the nitride semiconductor layer, so, with this light-emitting body, not only high-speed response and high light emission intensity are obtained, but also an excellent persistence rate.

Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device

The present invention relates to an illuminant, etc., having a high response speed and a high luminous intensity. The illuminant comprises a substrate and a nitride semiconductor layer provided on one surface of the substrate. The nitride semiconductor layer emits fluorescence in response to incidence of electrons. At least part of the emitted fluorescence passes through the substrate, and then exits from the other surface of the substrate. Generation of the fluorescence is caused by incidence of electrons onto a quantum well structure of the nitride semiconductor layer and recombination of pairs of electrons and holes generated due to electron incidence, and the response speed of fluorescence generation is on the order of nanoseconds or less. Also, the luminous intensity of the fluorescence becomes equivalent to that of a conventional P47 fluorescent substance. Namely, the illuminant has a response speed and a luminous intensity that are sufficient for adaptation to scanning electron microscopes and mass spectroscopes.

Growing community of inventors

Hamamatsu, Japan

Itaru Mizuno