Anritsu Infivis Co., Ltd.

Itaru Miyazaki

Akihiro Tanaka

Hisashi Hayashi

Naoya Saito

Takashi Kanai

Provided is an X-ray inspection apparatus that can inspect an object to be inspected with high sensitivity by using a multiple-stage X-ray sensor without widening a slit of a collimator, and can prevent the apparatus from becoming large-sized due to prevention of X-ray leakage. An X-ray inspection apparatus includes an X-ray irradiation portion having an X-ray tube generating an X-ray, an X-ray sensor having detection element arrays in a plurality of stages in a carrying direction, the detection element arrays each formed of a plurality of detection elements linearly arranged in a main scanning direction orthogonal to the carrying direction on a plane parallel to the carrying surface of an object to be inspected, a collimator restricting an X-ray irradiation region for the X-ray sensor, and an imaging condition input section that designates one or more detection element arrays to be used for inspection.

X-ray inspection apparatus

To correctly acquire image data of an inspected article by preventing a difference in shade between images caused by a difference in position or sensitivity between sensor elements. An X-ray generation source irradiates an inspection region where an inspected article passes with an X-ray. X-ray detection means receives the X-ray passing through the inspection region using a plurality of sensor elements. Image data generation means generates image data of the inspected article from an output of the X-ray detection means. Incidence condition changing means changes two or more kinds of X-ray incidence conditions common for all of the plurality of sensor elements of the X-ray detection means in a state of absence of the inspected article in the inspection region. Correction data generation means acquires correction data that is needed for making a shade of an image uniform for each incidence condition.

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Kanagawa, Japan

Itaru Miyazaki