Xtreme Technologies Gmbh

Jenoptik Gmbh

Istvan Balogh

Kai Gaebel

Joerg-Peter Schmidt

The invention is directed to a collector mirror for short-wavelength radiation based on a plasma. It is the object of the invention to find a novel possibility for managing the temperature of a collector mirror for focusing short-wavelength radiation generated from a plasma which allows an efficient thermal connection to be produced between the optically active mirror surface and a thermostat system without the disadvantages relating to space requirements or high-precision manufacture of the collector mirror. This object is met, according to the invention, in that the collector mirror has a solid, rotationally symmetric substrate which comprises a material with high thermal conductivity of more than 50 W/mK and in which channels for cooling and temperature management are incorporated in the substrate so that a heat transport medium can flow through directly and for rapidly stabilizing the temperature of the optically active mirror surface. Heat of transient temperature spikes which occur in pulsed operation for plasma generation at the mirror surface and which temporarily exceed the temperature average by a multiple is quickly dissipated.

Collector mirror for plasma-based, short-wavelength radiation sources

A device according to the invention enables a high-precision adjustment of lenses or lens groups in a mounted high-performance lens system at any time. The lens or lens group to be adjusted is fixed in a lens mount which is held in a frictional engagement in a first mount. The fit clearance between the lens mount and first mount which is arranged in the high-performance lens system so as to be substantially virtually free of play radially is at least as great as the desired adjustment region. Piezoelectric translators are arranged in the wall region of the lens mount so as to be parallel to the optical axis and act against the contact-pressing force bringing about the frictional engagement during the adjustment process so that the force required for the displacement of the lens mount in the first mount via radially acting adjusting members is small.

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Jena, Germany

Istvan Balogh