Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Wormsensing

Ismail Degirmencioglu

Lamine Benaissa

Jean-Sébastien Moulet

Jean-Sébestien Moulet

Jude Guelfucci

A functionalized object includes at least one mechanical wave sensor providing the object with a vibration and deformation detection capability. The mechanical wave sensor comprises: a sensitive cell having a thickness less than or equal to 50 microns, and comprising an active layer made of a monocrystalline or polycrystalline piezoelectric material and two electrodes, which are in contact with the active layer and accessible at a first surface of the sensitive cell, and a support layer secured to the second surface of the sensitive cell and secured to the object. The functionalized object comprises at least two electrically conductive strips disposed on the first surface of the sensitive cell and on a surface of the object, each strip connecting an electrode to an electrical contact pad. A method is used for producing such a functionalized object.

Functionalized object with integrated mechanical wave sensor and associated production method

A transfer method includes steps of a) supplying a support layer having a first face, structures being assembled by their front face on the first face, and c) transferring the structures onto a host face of a host substrate. The support layer includes folding regions, between the structures, adapted to pass from a folded state to an unfolded state under the action of an external excitation. Between steps a) and c), a step b) is included of executing the external action in such a way as to make the folding regions pass from the folded state to the unfolded state such that the spacing between the structures varies.

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Grenoble, France

Ismail Degirmencioglu