Seiko Epson Corporation

Isao Yanagisawa

Yasuo Inaoka

Kazutoshi Goto

Takuma Okamuro

Hiroshige Owaki

Mutsuhiko Ota

Motonori Okumura

Yoshihiro Igarashi

Eiju Hirai

Ikuya Miyazawa

Masashi Fujioka

Hiroki Honma

In an MEMS device, in a Z direction that is a direction in which a first core portion, a plurality of first bump wiring, and a plurality of first individual wiring are laminated, a width between the first core portion and a wiring substrate is wider than a maximum particle diameter of solid particles contained in an adhesive, and a width between a first wiring and a second wiring and a width between a third wiring and a fourth wiring are wider than the maximum particle diameter of the solid particles.

MEMS device, liquid ejecting head, and liquid ejecting apparatus

An alignment method includes: disposing an alignment mark provided to a positioned member and a reference mark provided to a surface of an alignment mask so that the alignment mark and the reference mark can face each other; capturing an image from the other surface side of the alignment mask, which is the opposite surface of the alignment mask from the surface where the reference mark is disposed, the image concurrently showing the alignment mark and the reference mark; performing a surface treatment on at least a region of the positioned member side of the alignment mask, which is captured as the image, rather than on the reference mark side thereof, the surface treatment providing a high contrast ratio to each alignment mark and reference mark on the captured image; and thereafter aligning the alignment mark with the reference mark, while checking the image.

Alignment method of liquid-jet head unit

An alignment jig for a liquid-jet head, which is used when positioning and joining a nozzle plate and a fixing member, the nozzle plate having nozzle orifices for jetting a liquid of the liquid-jet head and an alignment mark for alignment, the fixing member being adapted to hold a plurality of the liquid-jet heads, the alignment jig comprising a mask which is a transparent member provided with a reference mark for alignment with the alignment mark, the reference mark being formed within the mask.

Alignment jig and alignment apparatus for liquid-jet head and method for producing liquid-jet head

A liquid-jet head, including: a plurality of head bodies each furnished with a nozzle plate having a plurality of nozzles formed therein; a joining member, adhered to the nozzle plate via an adhesive agent, for binding and fixing the plurality of head bodies; an opening formed in a region of the joining member corresponding to the nozzles; and a protrusion formed in an edge portion of the opening facing the nozzle plate, and protruding toward the nozzle plate, wherein when the joining member is joined to the nozzle plate via the adhesive agent, the protrusion is allowed to bite into the nozzle plate.

Liquid-jet head apparatus having a fixing plate formed with a protrusion

Alignment jig, manufacturing method thereof, and method of manufacturing liquid-jet head unit

A liquid-jet head includes: a plurality of head bodies, each having: a nozzle plate having a plurality of nozzles bored therein; a passage-forming substrate having a pressure generating chamber formed therein, which communicates with the nozzle and receives a pressure for use in ejecting a liquid droplet from a pressure generating element; and a head case disposed on the passage-forming substrate at a surface opposite to the nozzle plate and having paths for supplying liquid to the pressure generating chamber therethrough; and a fixing member bonded onto a side of the nozzle plate of each of the plurality of head bodies, to positionally fix the head bodies thereto at predetermined intervals, wherein a reinforcing portion made of a predetermined adhesive agent, which is charged in a clearance between the head bodies fixed to the fixing member, followed by setting, is disposed at the clearance.

Liquid-jet head and liquid-jet apparatus

An adjusting unit for making positional adjustment of the optical axis adjustment mask, based on the observation by the one optical unit, such that the reference mark at the one location or the other location and the optical axis adjusting alignment mark corresponding positionally thereto are superposed, and for making optical axis adjustment of the other optical axis, based on the observation by the other optical unit, such that the reference mark at the one location or the other location and the optical axis adjusting alignment mark corresponding positionally thereto are superposed.

Alignment apparatus and alignment method

The invention provides a liquid ejecting head alignment apparatus that is used for positional determination and adhesion of nozzle plates and a fixation member, each of the nozzle plates having nozzle openings through which each of a plurality of liquid ejecting heads ejects liquid and further having alignment marks for positional alignment, the fixation member holding the nozzle-plate side of the plurality of liquid ejecting heads. The liquid ejecting head alignment apparatus according to the invention includes: a mask made of a transparent material, the mask having reference marks each of which is aligned with the corresponding alignment mark; a spacer jig that is provided between the fixation member and the mask in such a manner that the reference marks and the alignment marks are opposed to each other with a space being left therebetween, one surface of the spacer jig being in contact with the fixation member; and a bifocal microscope having an optical axis and two optical systems that shares the optical axis, the optical axis being oriented from a face of the mask that is opposite to the spacer jig side thereof toward the alignment mark via the reference mark and the space, one of the optical systems being capable of focusing on the reference mark, and the other thereof being capable of focusing on the alignment mark.

Liquid ejecting head alignment apparatus and liquid ejecting head alignment method

An alignment jig including a base jig which is used when bonding a nozzle plate provided with nozzle orifices which eject liquid in a liquid-jet head to a fixing member holding a nozzle plate side of a plurality of the liquid-jet heads, and which is provided with a penetrated hole in a thickness direction in a region facing a reference mark to be aligned with an alignment mark provided on the nozzle plate as well as the fixing member is held on one plane of the base jig; and a mask which is provided on the other plane of the base jig and has transparency, and where a protrusion protruding in the penetrated hole is formed with the reference mark provided on an edge plane of the mask.

Method of manufacturing alignment jig and liquid-jet head unit

An alignment apparatus, which is used when positioning and joining a plurality of workpieces relative to each other, each workpiece having a plurality of alignment marks for alignment, the alignment apparatus includes: a transparent mask provided with reference marks with which the alignment marks are aligned; a mirror disposed between the mask and the workpiece; an optical unit having an optical axis pointed in a direction of the mirror via the reference mark from a side of the mask opposite to the mirror, the optical unit enabling the reference mark and a virtual image of the reference mark reflected in the mirror to be observed simultaneously; and an adjusting unit for making optical axis adjustment of the optical axis, based on the observation by the optical unit, such that a real image of the reference mark and the virtual image of the reference mark reflected in the mirror are superposed.

Growing community of inventors

Chino, Japan

Isao Yanagisawa