Komatsu Corporation

Isao Shibata

Norio Takahashi

Shunsuke Miyamoto

Tomohisa Sato

Toshiyuki Kamei

Masashi Osanai

Hironori Akiba

Hiroaki Takechi

Tsutomu Hatanaka

Takumi Sugihara

A temperature control system which performs control of an object whose temperature is to be controlled as accurately as possible. The system comprises: a chiller located in a fluid circulating and supplying system, for cooling a thermal fluid returning from a vacuum chamber, a first flow control valve located in the fluid circulating and supplying system in a position between the chiller and the vacuum chamber, a bypass passage for splitting and supplying thermal fluid returning from the vacuum chamber to a position between the first flow control valve and the vacuum chamber, before it reaches the chiller, a second flow control valve located in the bypass passage, and a halogen lamp heater located in the fluid circulating and supplying system in a position between a confluence point of the bypass passage and the vacuum chamber, for adjusting the temperature of the thermal fluid passing therethrough to a set temperature.

Temperature control device and temperature control method

Growing community of inventors

Hiratsuka, Japan

Isao Shibata