Canon Kabushiki Kaisha

The University of Arizona

Arizona Board of Regents, a Body Corporate

Isao Matsubara

William J Dallas

Chung-Chieh Yu

Yasuyuki Unno

Mamoru Miyawaki

Tom D Milster

An apparatus for, and method of, image reconstruction. The method includes first breaking a holographic image into a plurality of interlaced sample sets corresponding to color separation images; and independently sampling, filtering, and reconstructing all sets. The resulting demodulated images contain no fringes. Notably, range-clipped tonal rendering curves are used to choose pixel regions of the demodulated images that will replace saturated regions. The image is reconstructed by integrating all un-saturated images into one.

Method of reconstructing a holographic image and apparatus therefor

An optical system for a holographic microscope includes: a light source configured to emit a light beam; a grating configured to split the light beam into a reference beam and an object beam; a lens unit configured to irradiate a sample by the reference and object beams split by the grating; a spatial filter including a first region for the reference beam and a second region for the object beam; and a detector configured to detect an interference pattern caused by the reference and object beams.

Optical system for a holographic microscope including a spatial filter

The present invention provides an apparatus for tomographic imaging of an object. The apparatus includes a light unit configured to generate illumination, which comprises coherent light and has random phase distribution in a plane perpendicular to an optical axis, for illuminating an object, a coupler which combines a reference beam and an object beam for an interference, a shifter configured to shift relative phase difference between the object light and the reference coherent light, a detector configured to detect an interference caused by the reference coherent light and object light for the each phase, and a processor configured to calculate an optical propagation based on the detected interference for the each phase.

System for tomographic imaging using coherent light that has a random phase distribution

The present invention provides a hologram which forms a light intensity distribution on a predetermined plane by using incident light. The hologram includes a plurality of cells configured to control both a phase of a first polarized light component in a first polarization direction of the incident light and a phase of a second polarized light component in a second polarization direction perpendicular to the first polarization direction, to form a phase difference distribution between phase distributions for the first and second polarized light components. The plurality of cells are designed so that a number of phase difference levels of the phase difference distribution is less than a number of phase levels of the phase distribution of the first polarized light component.

Hologram with cells to control phase in two polarization directions and exposure apparatus

An interferometric method for detecting information about a sample includes emitting a laser beam; splitting the laser beam into a reference beam and an object beam; transmitting the object beam through the sample in an incident angle; combining the reference beam with the object beam passed through the sample to form an interference pattern; detecting the interference pattern, and non-linearly scanning the object beam in order to detect a plurality of interference patterns.

Interferometric method and digital holographic microscope

A method and apparatus for reducing speckle noise in an image of an object are disclosed. The method includes, placing the object in an interferometer at a first position along a beam path of an object beam, irradiating the object with the object beam, moving the object from the first position to a second position by longitudinally shifting the object along the beam path of the object beam, irradiating the object with the object beam at the second position. At each of the first and second positions a holographic image formed by interference between the object beam and a reference beam is recorded. An object image with reduced speckle noise is obtained by averaging the holographic images. Either an arithmetic mean or a weighted average may be used in the averaging of the holographic images.

Speckle noise reduction based on longitudinal shift of sample

The present invention provides a hologram which forms a light intensity distribution on a predetermined plane by using an incident light. The hologram includes a plurality of cells configured to control both a phase of a first polarized light component of the incident light and a phase of a second polarized light component. The plurality of cells are designed to form a portion in an overlap region in which a first light intensity distribution region formed on the predetermined plane by the first polarized light component and a second light intensity distribution region formed on the predetermined plane by the second polarized light component are superposed on each other. The phase of the first polarized light component is diffused in the portion formed in the overlap region.

Hologram, hologram data generation method, and exposure apparatus

The present invention provides a computer generated hologram including a plurality of anisotropic cells having different refractive indices with respect to linearly polarized light in a first direction and linearly polarized light in a second direction perpendicular to the linearly polarized light in the first direction, wherein the plurality of anisotropic cells are made of an identical material and includes a first anisotropic cell, a second anisotropic cell, a third anisotropic cell, and a fourth anisotropic cell which have different thicknesses, and the plurality of anisotropic cells change phases of linearly polarized light in the first direction and linearly polarized light in the second direction, thereby making a first light intensity distribution formed on a predetermined plane by the linearly polarized light in the first direction different from a second light intensity distribution formed on the predetermined plane by the linearly polarized light in the second direction.

Computer generated hologram, exposure apparatus and device fabrication method

A present invention provides a computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, the hologram including a first anisotropic cell and second anisotropic cell configured to change a polarization state of the incident light, and a first isotropic cell and second isotropic cell configured not to change the polarization state of the incident light, wherein a direction of an optic axis of the first anisotropic cell is different from a direction of an optic axis of the second anisotropic cell, and a thickness of the first isotropic cell is different from a thickness of the second isotropic cell.

Computer generated hologram and exposure apparatus to suppress an illumination variation and loss in light

A computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, the hologram comprising a plurality of anisotropic cells each including an anisotropic medium configured to change a polarization state of the incident light, and a plurality of isotropic cells each including an isotropic medium configured not to change a polarization state of the incident light, wherein a linearly polarized light component, in a first direction, of the incident light forms a first light intensity distribution on the predetermined plane, and a linearly polarized light component, in a second direction perpendicular to the first direction, of the incident light forms a second light intensity distribution different from the first light intensity distribution on the predetermined plane.

Computer generated hologram including plural isotropic and anisotropic cells for forming combined intensity distribution, generation method, and exposure apparatus

A computer generated hologram includes a plurality of cells which form a light intensity distribution on a predetermined plane. The plurality of cells includes a plurality of first cells including isotropic media and anisotropic media, and a plurality of second cells including anisotropic media alone. The plurality of cells change a phase of incident light which impinges on each of the plurality of cells to form a phase distribution including N phases (N is the number of phases, N&#x2267;2) for each of a wavefront of a linearly polarized light component in a first direction and a wavefront of a linearly polarized light component in a second direction perpendicular to the first direction.

The present invention provides a computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, comprising an anisotropic layer whose refractive index with respect to linearly polarized light in a first direction is different from a refractive index of the anisotropic layer with respect to linearly polarized light in a second direction perpendicular to the linearly polarized light in the first direction, and an isotropic layer whose refractive index with respect to the linearly polarized light in the first direction is equal to a refractive index of the isotropic layer with respect to the linearly polarized light in the second direction.

Growing community of inventors

Tucson, AZ, United States of America

Isao Matsubara