Kawasaki Jukogyo Kabushiki Kaisha

Isao Kato

Hirohiko Goto

Takahiro Inada

Shigeki Ono

Yuji Maeguchi

Ryota Ono

Masayuki Saito

Iori Kurata

Tadashi Isomura

A robot includes first and second arms to rotate and convey an object; a first rotary body to support the first arm and having a first fluid passage and at least one second fluid passage communicating with the first fluid passage; a base-end-side arm formed with an internal space and a hole part into which a part of the first rotary body is inserted; a second rotary body to support the second arm and having a third fluid passage communicating at one end thereof with the second fluid passage and communicating at the other end thereof with the internal space; a supplying device disposed in the internal space and connected to an upstream-end side of the first fluid passage, and to supply fluid to the first fluid passage; a first motor to rotate the first rotary body; and a second motor to rotate the second rotary body.

Robot

A substrate conveying robot has left and right arms having a common pivot axis line, an arm drive unit for driving the left and right arms, and a control unit for controlling the arm drive unit. A pulley ratio between a turning pulley, a first pulley, a second pulley, and a third pulley is set so that a moving locus of the substrate holding members when the first link member is rotated about the pivot axis line by the first drive portion so as to extend and contract the arm in a state that the turning pulley is fixed is substantially linear. Thereby, the moving locus of the substrate holding member when extending and contracting the arm can be substantially linear.

Substrate conveying robot and method of operating the same

Described herein is a conveyance robot. In certain aspects, a conveyance robot can include a first link member configured to be rotatable about a first axis, a second link member configured to be rotatable about a second axis positioned at a predetermined distance relative to the first axis, a holding member configured to be capable of holding an article and rotating about a third axis positioned at a predetermined distance relative to the second axis, an ascending and descending drive unit for driving at least the holding member to ascend and descend. In certain aspects, an arm link mechanism can be included. The arm link mechanism can be constituted by connecting the first link member, the second link member, and the holding member in this order, and the ascending and descending drive unit is placed between the first link member and the holding member so as to form a part of the arm link mechanism.

Transfer robot

Growing community of inventors

Nishinomiya, Japan

Isao Kato