Omron Corporation

Isamu Kimura

Masatoshi Oba

Koji Sano

Masao Jojima

Takashi Itakura

An electrostatic micro switch includes a fixed electrode disposed on a fixed substrate; a movable substrate elastically supported by the fixed substrate, the movable substrate including a movable electrode facing the fixed electrode. The movable substrate includes a semiconductor including a plurality of regions having different values of resistivity and a region of high resistivity is disposed near the movable electrode.

Electrostatic micro switch, production method thereof, and apparatus provided with electrostatic micro switch

A pressure-detecting chamber , a pressure-directing path and a buffer space are formed on the upper face of a main-body-side substrate as recessed portions, and the upper face of the pressure-detecting chamber is covered with a thin-type diaphragm , and upper faces of the pressure-directing path and the buffer space are covered with a cover substrate . A pressure-introducing unit formed on the lower face of the main-body-side substrate is connected to the lower face of the buffer space . The cross-section of the buffer space is greater than the cross-section of the pressure-introducing unit , and the capacity of the buffer space is greater than the capacity of the pressure-directing path . With this arrangement, it is possible to provide a pressure sensor which can control the response characteristic of the pressure sensor to a pressure change with high precision without causing serious adverse effects on the other characteristics of the pressure sensor, without preventing the miniaturization of the sensor.

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Koka, Japan

Isamu Kimura