Funai Electric Company Ltd.

Kyoto University

Kagawa University

Isaku Kanno

Manabu Murayama

Hidetoshi Kotera

Hitoshi Fujii

Naoki Inoue

Takaaki Suzuki

Daisuke Hiramaru

There is provided a vibrating mirror element capable of inhibiting flexural deformation of a support portion. This vibrating mirror element () includes a mirror portion (), a deformable driving portion (), and a support portion () connected with a first connecting portion () of the driving portion on the side of a first end portion (), while the thickness of the support portion is larger than the thickness of the driving portion.

Vibrating mirror element and method for manufacturing vibrating mirror element

The disclosed method for producing a microstructure can form a complicated three-dimensionally formed microstructure with few steps. A first mask pattern () containing a light transmitting section and a light blocking section is disposed along an unexposed photosensitive resin (), and a second mask pattern () containing a light transmitting section and a light blocking section is disposed on the reverse side of the first mask pattern () from the photosensitive resin (). Additionally, by means of integrally rotating the photosensitive resin () and the first mask pattern () around a central axis (Z) that passes through the photosensitive resin () and the first mask pattern (), and at the same time radiating exposure light from the reverse side of the second mask pattern () from the photosensitive resin () and the first mask pattern () in a direction that is inclined obliquely with respect to the direction of the central axis (Z), the light beam of the exposure light that is transmitted through the light transmitting section of the second mask pattern () and the light transmitting section of the first mask pattern () exposes the photosensitive resin ().

Method for producing microstructure

This vibrating mirror element () includes a mirror portion (), a first driving portion (), being cantilevered, including a first fixed end () formed on a first side of a first direction and a first free end () formed on a second side thereof, and linearly extending, a first mirror support portion () capable of supporting the mirror portion () in an inclined state, a second driving portion (), being cantilevered, including a second fixed end () formed on the second side of the first direction and a second free end () formed on the first side thereof, being point-symmetrical to the first driving portion with respect to the center of a mirror, and linearly extending, and a second mirror support portion () being point-symmetrical to the first mirror support portion with respect to the center of the mirror and capable of supporting the mirror portion in an inclined state.

Vibrating mirror element

This vibrating mirror element includes a mirror portion reflecting light, a torsionally deformable beam portion connected to the mirror portion for supporting the mirror portion in a vibratile manner, and a driving portion having a connecting portion connected with the beam portion for driving the mirror portion through the torsionally deformable beam portion. The width of the connecting portion of the driving portion is rendered smaller than the width of a portion of the driving portion other than the connecting portion in plan view.

This vibrating mirror element includes a pair of first beam portions supporting a mirror portion in a vibratile manner, a pair of second beam portions connected with the pair of first beam portions respectively, and a pair of driving portions connected with the pair of second beam portions respectively. The mirror portion is arranged in a region surrounded by the pair of second beam portions and the pair of driving portions. The width of the pair of first beam portions and the width of the pair of second beam portions are rendered smaller than the width of the pair of driving portions.

A vibrating mirror element includes a base member, a substrate made of metal, integrally formed with a mirror portion, a movable portion swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion supporting the movable portion and mounted on the base member, a piezoelectric film provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode provided on the piezoelectric film.

Growing community of inventors

Kyoto, Japan

Isaku Kanno