Kawasaki Jukogyo Kabushiki Kaisha

Ippei Shimizu

Hiroyuki Okada

Yoshiki Maeda

Takahiro Abe

Junichi Sato

Ryunosuke Takauji

Daisuke Yamanaka

Masaya Yoshida

Satoshi Yamada

Shinya Kitano

A robot that transfers a substrate includes a hand, an arm, a substrate detector, and a substrate orientation examiner. The hand holds and transfers the substrate. The arm is connected to the hand and moves the hand. The substrate detector detects absence or presence of the substrate in a non-contact manner. The substrate orientation examiner examines an orientation of the substrate based on a height detected by the substrate detector at which the substrate is located when it is not held by the hand.

Robot and substrate orientation examination method

A robot hand to hold a substrate, which includes a base body, a blade defining a holding position for holding the substrate and attached at a base part to the base body, and a differential screw having a center axis perpendicular to a principal surface of the substrate existing at the holding position and configured to attach the base part of the blade to the base body. The differential screw includes a first threaded part having a first pitch, a second threaded part having a second pitch different from the first pitch, and an intervening member coaxially having a third threaded part to be threadedly engaged with the first threaded part, and a fourth threaded part to be threadedly engaged with the second threaded part. The first threaded part is provided to the base body, and the second threaded part is provided to the base part of the blade.

Robot hand, robot and fixing device

Blades, base parts to which the blades are fixed, a guide mechanism configured to guide movement of the base parts in a direction in which the base parts are arranged side by side, and a linkage mechanism configured to parallelly change intervals of the base parts according to angle changes of link members coupled to the base parts, are included. An interval fine-adjustment mechanism is provided at each of coupling parts between the base pars and the link members, the interval fine-adjustment mechanism being configured to finely adjust positions of the base parts in the direction in which the base parts are arranged side by side, individually. According to this, a blade interval adjusting device capable of finely adjusting the intervals of the blades which transfer wafers etc., is provided.

Blade interval adjusting device

At least three spherical surface sliding bearings provided between a first member and a second member and disposed at mutually different positions when seen in the height direction, are provided. Each of the at least three spherical surface sliding bearings has an inner ring and an outer ring, either one of the inner ring and the outer ring is attached to the first member, and the other is attached to the second member. In at least two of the at least three spherical surface sliding bearings, the height adjustment mechanism intervenes, at least either one of between one of the inner ring and the outer ring, and the first member, and between the other and the second member.

Inclination adjusting device and robot provided with the same

A robot includes a guide, a mover, a hand, a deformation acquirer, a orientation adjuster, and a controller. The mover is installed to the guide and movable in a direction that the guide guides along. The hand is installed to the mover and holds a substrate. The deformation acquirer acquires information on a deformation of the guide. The orientation adjuster adjusts an orientation of the hand according to the deformation of the guide acquired by the deformation acquirer. The controller controls operation of the orientation adjuster. The controller adjusts the orientation of the hand performing a holding operation on the substrate to be transferred by using the orientation adjuster based on the information on the deformation of the guide.

Robot and hand orientation adjustment method

A substrate conveying robot includes a cable guide that is arranged inside a housing, in which a robot cable extending from an arm is arranged, and that deforms to follow the robot cable moved as the arm is moved up and down.

Substrate conveying robot

A substrate holding hand includes a supporting plate where a circular reference capture range is defined, a plurality of pads disposed within the reference capture range, at least one stationary stopper that is disposed along an outer circumferential circle of the reference capture range, at least one movable stopper having a part at the same height from the supporting plate as the stationary stopper, and a stopper actuator that moves the movable stopper from a retracted position outside the reference capture range to a deployed position closer to the stationary stopper than the retracted position. A circular reduced capture range is defined by the movable stopper at the deployed position, and the front stopper, and a diameter of the reduced capture range is larger than a diameter of the substrate and smaller than a diameter of the reference capture range.

Substrate holding hand and substrate transferring robot

A robot is for transferring a substrate. The robot includes an arm, a hand, and a tilter. The arm is movable. The hand is installed to the arm to project from it and holds and transfers the substrate. The tilter tilts an orientation of the hand. The hand includes a holder. The holder contacts the top surface and the bottom surface of the substrate. With the tilter, the holder holds the substrate keeping in contact with the top surface and the bottom surface of the substrate and applying forces to only one of two halves of the substrate bisected.

Robot

A substrate mapping devicemaps a plurality of substratesinside a container where the substratesare accommodated so as to be arrayed in a given arrayed direction. The substrate mapping deviceincludes a sensorconfigured to detect a state of the substrate, a manipulatorconfigured to move the sensor, and a control deviceconfigured to control the manipulatorto move the sensoralong a mapping course. The control devicesets a first mapping position and a second mapping position different in the position in the arrayed direction of the substratesfrom the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.

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Kobe, Japan

Ippei Shimizu