Valqua, Ltd.

Nippon Valqua Industries, Ltd.

Applied Materials, Inc.

Ippei Nakagawa

Nobuhiro Yoshida

Sangho Kim

Hamid Noorbakhsh

Michi Kuroda

Sang Ho Kim

A seal member includes a bottom portion, a first side wall portion, a second side wall portion, and an outer wall portion. At least one of the first side wall portion and the second side wall portion is provided to be outwardly widened from the bottom portion toward the outer wall portion with respect to a virtual plane perpendicular to an axis. The outer wall portion has a recessed portion recessed toward a bottom portion side, between the first side wall portion and the second side wall portion, and the outer wall portion forms a first lip region in a region including the first side wall portion, and forms a second lip region in a region including the second side wall portion, with the recessed portion being sandwiched therebetween.

Seal member

Seal material

Provided is a composite seal member that can maintain performance such as vacuum seal performance, plasma resistance, and corrosive gas resistance over a long period. The composite seal member is mounted in a seal groove provided in a body surface of a first member, and establishes a sealed state between the first member and a second member when the second member is moved closer toward the first member. The composite seal member includes a first seal member disposed on the side of a first side wall of the seal groove and made of an elastic member, and a second seal member disposed on the side of a second side wall of the seal groove and made of a material that is harder than the first seal member. The second seal member has at least a second side wall abutment surface that extends generally in parallel with and makes surface contact with the second side wall of the seal groove, and a seal abutment surface that extends generally in parallel with a seal surface of the second member, and that makes surface contact with the seal surface of the second member in the sealed state.

Composite seal member

Seal member for semiconductor production apparatus

Composite seal member for semiconductor production apparatus

Seal

Implementations described herein provide a substrate support assembly that includes a seal band. The seal band protects an adhesive layer that is disposed between an electrostatic chuck (ESC) and a cooling plate of the substrate support assembly. In one example, a substrate support assembly includes an electrostatic chuck and a cooling plate. A bonding layer secures a bottom surface of the electrostatic chuck to a top surface of the cooling plate. The bonding layer has an adhesive layer and a seal band. The seal band circumscribes and protects the adhesive layer. The seal band has a ring shaped body. The ring shaped body has a top surface connected to a bottom surface by an inner surface and an outer surface. The top surface and the bottom surface angled less than 85 degrees from the inner surface. The outer surface has an indent formed therein.

Ceramic electrostatic chuck having a V-shape seal band

Seal member for use in semiconductor production apparatus

Growing community of inventors

Gojo, Japan

Ippei Nakagawa