Kawasaki Jukogyo Kabushiki Kaisha

Kawasaki Robotics (usa), Inc.

Iori Kurata

Hirohiko Goto

Junichi Matsuoka

Isao Kato

Tomokazu Arita

Masayuki Saito

A substrate transport robot includes: a base installed inside a transport chamber; an arm; a first hand and a second hand rotatable about a vertical hand axis and configured to support a substrate; and a controller. The controller performs: a first transfer process of causing the first hand to enter from the transport chamber into a storage chamber, and transferring the substrate between the first hand and a placing portion in the storage chamber; an exit process of causing the first hand to exit the storage chamber into the transport chamber; and a second transfer process of causing the second hand to enter from the transport chamber into the storage chamber. In the exit process, the hand axis moves away from a center line of an opening, such that the hand axis is farther from the center line than a reference position of the first hand is.

Substrate transport robot, substrate transport system, and substrate transport method

A substrate conveying robot has left and right arms having a common pivot axis line, an arm drive unit for driving the left and right arms, and a control unit for controlling the arm drive unit. A pulley ratio between a turning pulley, a first pulley, a second pulley, and a third pulley is set so that a moving locus of the substrate holding members when the first link member is rotated about the pivot axis line by the first drive portion so as to extend and contract the arm in a state that the turning pulley is fixed is substantially linear. Thereby, the moving locus of the substrate holding member when extending and contracting the arm can be substantially linear.

Substrate conveying robot and method of operating the same

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San Jose, CA, United States of America

Iori Kurata