Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (1 from 131,611 patents)
1 patent:
1. 12191190 - Substrate processing chamber, substrate processing system including the same, and substrate processing method using the same