Massachusetts Institute of Technology

Eth Zurich

Inigo Garbayo

Jennifer Rupp

Reto Max Pfenninger

Michal Struzik

Andreas Nenning

Thin films of lithium-containing materials and methods for fabricating them are generally described. In some embodiments, the formation of a first vapor is induced from a first target and the formation of a second vapor is induced from a second target, resulting in the formation of a thin film. In some embodiments, at least a portion of the formation of the first vapor and the formation of the second vapor occurs under vacuum conditions. In some embodiments, the thin film has a relatively high ionic conductivity, mixed ionic/electronic conductivity, or other properties beneficial for applications such as active electrode materials or solid-state electrolytes.

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Pamplona, Spain

Inigo Garbayo