Telefonaktiebolaget Lm Ericsson (publ)

Micronic Laser Systems Ab

Ingvar Gustaf Andersson

Peter Ekberg

Torbj&ouml;rn Sandstr&ouml;m

Anders Henriksson

Mattias Israelsson

Leif Odselius

Stefan Gullstrand

Per Erik Andersson

Pontus Lindqvist

Jan Ekl&ouml;f

The present invention relates to a system and a method for microlithographic writing and inspection on photosensitive substrates, and specially printing and inspection of patterns with extremely high precision, such as photomasks for semiconductor device patterns, display panels, integrated optical, devices and electronic interconnect structures. More specifically the invention relates to compensation of substrate offset by modifying the position data or the feeding of the same of the deflector, and the use of a direct digital synthesis (DDS) unit for generation of the sweep frequency drive signal.

Beam positioning in microlithography writing

Variations in received signal amplitude caused by filter characteristics are reduced by a C/I measuring apparatus for a signal having a fluctuating carrier-frequency, comprising a filter for filtering the signal and means for splitting the signal into an RSS signal representing the signal strength and a BB signal representing the momentary carrier frequency deviation, comprising means for measuring the RSS signal unaffected by the frequency dependent attenuation in the IF filter. A method of measuring the C/I of a received signal is also disclosed. The method comprises the steps of filtering the signal using an IF filter to obtain one signal channel, feeding the signal to the FM detector and the RSSI unit, and measuring the signal strength of the received signal at a selected, substantially constant, carrier frequency.

Method and apparatus in a radio communication system

A packet switching network having a malfunction list is provided to reduce network congestion. According to an exemplary embodiment, each node in the network includes a malfunction list which stores an unavailability value representing a state of unavailability of certain addressees in the network. Before sending a packet to an addressee, the node consults its own malfunction list to determine the unavailability value of the addressee. A packet addressed to an unavailable addressee is selectively returned to the sender by the node rather than travelling through the network to the addressee and back through the network to the sender. Packets can be returned to the sender with a probability proportional to the unavailability value of the addressee so that transmission is gradually resumed after a state of unavailability as the unavailability value decreases over time.

Packet data communications system having a malfunction list

Growing community of inventors

Billdal, Sweden

Ingvar Gustaf Andersson