Leybold Vakuum Gmbh

Ingo Seckel

Heinrich Engländer

Peter Klingner

Markus Nothhelfer

A side channel pump, preferably a vacuum pump, includes a driven rotor () and a fixed stator (). The rotor () and the stator () define a pump channel circulating in a peripheral direction. Blades are fixed onto the rotor, protruding into the cross-section of the pump channel. The pump channel also includes a blade-free side channel (). The pump channel () containing the side channel () extends in a helical manner around the rotor (). The pump channel is advantageously not limited to the length of a winding but can have the length of substantially any number of uninterrupted windings. As a result, a high suction performance and a high compression ratio in the pump can be obtained.

Pump embodied as a side channel pump

A process is disclosed for testing the tightness of a package ( ) containing a packaged object ( ) and in which a test gas is contained; leak testing is performed in such a manner that the packaged object ( ) is introduced into a test chamber formed by two extensible foils ( ) and where the space between the foils ( ), in which the packaged object is contained, is evacuated in such a manner that the foils ( ) can wrap the packaged object ( ); at least in the areas of their surfaces which face the packaged object ( ) and in which the tightness of the package ( ) is to be inspected, the foils ( ) are provided with means ( ) which form a coherent intermediate space ( ) over the areas to be inspected of the package ( ); the intermediate space ( ) is evacuated down to a pressure lower than the pressure within the package ( ); the evacuated intermediate space ( ) is connected to a detector ( ) sensitive to the test gas to determine if test gas escapes outwards through the inspected area of the package ( ).

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Bornheim, Germany

Ingo Seckel