Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Nts Gmbh (1 from 75 patents)
2. Carl Zeiss Multisem Gmbh (33 patents)
1 patent:
1. 6967328 - Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor