Infineon Technologies Ag

Infineon Technologies Austria Ag

Ingo Muri

Iris Moder

Hans-Joachim Schulze

Johannes Baumgartl

Oliver Hellmund

Hans Weber

Bernhard Goller

Daniel Tutuc

Thomas Christian Neidhart

Friedrich Kroener

Jacob Tillmann Ludwig

Sophia Friedler

Manfred Engelhardt

Werner Schustereder

Gerhard Schmidt

Christian Fachmann

Matthias Kuenle

Maximilian Treiber

Barbara Eichinger

Alexander Binter

Christian Grindling

Anton Mauder

Thorsten Meyer

Frank Dieter Pfirsch

Ralf Siemieniec

Roland Rupp

Francisco Javier Santos Rodriguez

Till Schloesser

Alexander Frey

Olaf Storbeck

Joerg Ortner

Annette Saenger

Alfred Sigl

Felix Schubert

Doris Sommer

Tobias Weindler

Disclosed is a method for producing a semiconductor device, the method including forming a plurality of semiconductor arrangements one above the other, wherein forming each of the plurality of semiconductor arrangements includes forming a semiconductor layer, forming a plurality of trenches in a first surface of the semiconductor layer, and implanting dopant atoms of at least one of a first type and a second type into at least one of a first sidewall and a second sidewall of each of the plurality of trenches. Forming of at least one of the plurality of semiconductor arrangements further includes forming a protective layer covering mesa regions between the plurality of trenches of the respective semiconductor layer, and covering a bottom, the first sidewall and the second sidewall of each of the plurality of trenches that are formed in the respective semiconductor layer.

Method for producing a superjunction device

A transistor device is provided. In an example, the transistor device includes a semiconductor body having a first main surface, a second main surface opposite to the first main surface. The transistor device further includes a transistor cell array including a plurality of transistor cells. The transistor cell array includes a first load electrode over the first main surface. The first load electrode is electrically connected to the plurality of transistor cells. The transistor cell array further includes a second load electrode over the second main surface. The second load electrode is electrically connected to the plurality of transistor cells. The plurality of transistor cells includes at least one control electrode including carbon.

Transistor device and method of manufacturing

A power conversion circuit includes a high-side switch and a low-side switch connected in series with one another and configured to control a load current flowing through a load, wherein at least one of the high-side switch and the low-side switch comprise a power relay circuit for switching the load current, and wherein the power relay circuit comprises a micro-electro-mechanical system switch, and a semiconductor power switch, wherein the MEMS switch and the semiconductor power switch are connected in series with the load.

Power relay circuit

A semiconductor device includes a semiconductor substrate having a first dopant and a second dopant. A covalent atomic radius of a material of the semiconductor substrate is i) larger than a covalent atomic radius of the first dopant and smaller than a covalent atomic radius of the second dopant, or ii) smaller than the covalent atomic radius of the first dopant and larger than the covalent atomic radius of the second dopant. The semiconductor device further includes a semiconductor layer on the semiconductor substrate and semiconductor device elements in the semiconductor layer. A vertical concentration profile of the first dopant decreases along at least 80% of a distance between an interface of the semiconductor substrate and the semiconductor layer to a surface of the semiconductor substrate opposite to the interface.

Semiconductor device having semiconductor device elements in a semiconductor layer

A method for forming a drift region of a superjunction transistor and a superjunction transistor device are disclosed. The method includes forming first regions of a first doping type and second regions of a second type in a semiconductor body such that the first and second regions are arranged alternatingly in the body. The first and second regions are formed by: forming trenches in at least one semiconductor layer; implanting first type dopant atoms and second type dopant atoms into opposing sidewalls of the trenches; filling the trenches with a semiconductor material; and diffusing the dopant atoms in a thermal process so that the first type dopant atoms form the first regions and the second type dopant atoms form the second regions. Each trench has a first width, the trenches are separated by mesa regions each having a second width, and the first width is greater than the second width.

Superjunction transistor device and method for forming a superjunction transistor device

A method and a transistor device are disclosed. The transistor device includes: a semiconductor body; first regions of a first doping type and second regions of a second doping type in an inner region and an edge region of the semiconductor body; transistor cells in the inner region of the semiconductor body, each transistor cell including a body region and a source region, the transistor cells including a common drain region; and a buffer region arranged between the drain region and the first and second regions. A dopant dose in the first and second regions decreases towards an edge surface of the semiconductor body. A dopant dose in the buffer region decreases towards the edge surface.

Superjunction transistor device

A method includes: in a semiconductor wafer having a first semiconductor layer and a second semiconductor layer adjoining the first semiconductor layer, forming a porous region extending from a front surface into the first semiconductor layer; and removing the porous region by an etching process, wherein a doping concentration of the second semiconductor layer is less than 10times a doping concentration of the first semiconductor layer and/or a doping type of the second semiconductor layer is complementary to a doping type of the first semiconductor layer, wherein forming the porous region comprises bringing in contact a porosifying agent with the front surface of the first semiconductor layer and applying a voltage between the first semiconductor layer and a first electrode that is in contact with the porosifying agent, wherein applying the voltage comprises applying the voltage between the first electrode and an edge region of the first semiconductor layer.

Method of porosifying part of a semiconductor wafer

A method for producing a semiconductor device includes forming transistor cells in a semiconductor body, each cell including a drift region separated from a source region by a body region, a gate electrode dielectrically insulated from the body region, and a compensation region of a doping type complementary to the doping type of the drift region and extending from a respective body region into the drift region in a vertical direction. Forming the drift and compensation regions includes performing a first implantation step, thereby implanting first and second type dopant atoms into the semiconductor body, wherein an implantation dose of at least one of the first type dopant atoms and the second type dopant atoms for each of at least two sections of the semiconductor body differs from the implantation dose of the corresponding type of dopant atoms of at least one other section of the at least two sections.

A semiconductor device includes a semiconductor die, an electrical contact arranged on a surface of the semiconductor die, and a metal layer arranged on the electrical contact, wherein the metal layer includes a singulated part of at least one of a metal foil, a metal sheet, a metal leadframe, or a metal plate. When viewed in a direction perpendicular to the surface of the semiconductor die, a footprint of the electrical contact and a footprint of the metal layer are substantially congruent.

Semiconductor device including an electrical contact with a metal layer arranged thereon

A method includes: in a semiconductor wafer including a first semiconductor layer and a second semiconductor layer adjoining the first semiconductor layer, forming a porous region extending from a first surface into the first semiconductor layer; and removing the porous region by an etching process, wherein a doping concentration of the second semiconductor layer is less than 10times a doping concentration of the first semiconductor layer and/or a doping type of the second semiconductor layer is complementary to a doping type of the first semiconductor layer.

Method for partially removing a semiconductor wafer

A transistor device and a method for forming a transistor device are disclosed. The method includes: forming first regions of a first doping type and second regions of a second doping type in inner and edge regions of a semiconductor body; and forming body and source regions of transistor cells in the inner region. Forming the first and second regions includes: forming first and second implanted regions in the inner and edge regions, each first implanted region including at least dopant atoms of a first doping type and each second implanted region including at least dopant atoms of a second doping type; and diffusing the dopant atoms of both doping types in a thermal process such that dopant atoms of at least one of the first and second doping types have at least one of different diffusion rates and diffusion lengths in the inner and edge regions.

Method for forming a superjunction transistor device

A substrate wafer arrangement includes a substrate layer having a first main side and a second main side opposite the first main side, the first main side being a front-side and the second main side being a back-side, the substrate layer further having a plurality of semiconductor chips. A polymer structure arranged between the plurality of semiconductor chips extends at least from the front-side of the substrate layer to the back-side of the substrate layer and protrudes from a back-side surface of the substrate layer. The polymer structure separates a plurality of insular islands of conductive material, each insular island corresponding to a respective semiconductor chip of the plurality of semiconductor chips. Semiconductor devices produced from the substrate wafer arrangement are also described.

Semiconductor chip including back-side conductive layer

A method and a transistor device are disclosed. The method includes: forming first regions of a first doping type and second regions of a second doping type in an inner region and an edge region of a semiconductor body; and forming body regions and source regions of transistor cells in the inner region of the semiconductor body. Forming the first regions and second regions includes: forming semiconductor layers one on top of the other; and in each of the semiconductor layers and before forming a respective next one of the semiconductor layers, forming trenches in the inner region and the edge region and implanting dopant atoms into a first sidewall and a second sidewall of each trench. Implanting the dopant atoms into at least one of the semiconductor layers includes partly covering the trenches in the edge region during an implantation process.

A power relay circuit for switching a load current includes a micro-electro-mechanical system (MEMS) switch and a semiconductor power switch. The MEMS switch and the semiconductor power switch are connected in series with the load current.

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Villach, Austria

Ingo Muri