Technische Universiteit Eindhoven

Sorama Holding B.v.

Asml Netherlands B.v.

Stichting Voor De Technische Wetenschappen

Ines Lopez Arteaga

Rick Scholte

Johannes Petrus Martinus Bernardus Vermeulen

Ruud Antonius Catharina Maria Beerens

Wilhelmus Henricus Theodorus Maria Aangenent

Henk Nijmeijer

A system for generating a control signal comprises a data propagator () for propagating acoustic sensor array data relating to a set of acoustic measurements at a set of sensor positions covering an aperture towards a set of propagated positions to obtain propagated data relating to the set of propagated positions. A control signal generator () is arranged for generating a control signal based on the propagated data. The control signal generator () comprises a data analyzer () for analyzing the propagated data in a spatial frequency domain. The data propagator () is arranged for propagating the sensor array data in real-time and the control signal generator () is arranged for generating the control signal in real-time.

Generating a control signal based on propagated data

A lithographic apparatus includes a support constructed to support a patterning device, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate; a sensor array positioned and arranged to detect an acoustic wave from a movable part of the lithographic apparatus, a controller, the controller having a controller input connected to the sensor array so as to receive a sensor array output signal, and a controller output connected to at least one actuator arranged to act on the movable part, the controller being arranged to: calculate a movement of the movable part from the sensor array output signal, and drive via the controller output the at least one actuator in response to the calculated movement.

Lithographic apparatus and device manufacturing method

A method of performing near-field acoustic holography comprises the following steps. Establishing () acoustic data representing a set of near-field acoustic holography measurements at a first set of positions. Extrapolating () acoustic data using a model-based extrapolation to obtain extrapolated acoustic data relating to a plurality of positions outside the aperture. Applying () a spatial frequency transform to the padded acoustic data to obtain data in a spatial frequency domain. Propagating () the Fourier transformed acoustic data. Applying () a regularization in a wavenumber domain. Performing () an inverse spatial frequency transform.

Acoustic holography

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Eindhoven, Netherlands

Ines Lopez Arteaga