Lg Electronics Inc.

In Sik Kim

Tae Yoon Kim

Jun Bae Lee

Young Cho Shim

Infrared ray sensor and method for fabricating the same, the method including the steps of (a) forming a diaphragm on a substrate, (b) forming and patterning a semiconductor film on the diaphragm to form a first thermoelectric material film, and forming and patterning a conductor film on the diaphragm, to form a metal resistance layer in a region of the first thermoelectric material film and a second thermoelectric material film in a region of the diaphragm, (c) forming a protection film on an entire surface inclusive of the metal resistance layer, (d) forming a black body on the protection film, and (e) removing a back side portion of the substrate, to expose the diaphragm, whereby maintaining a high sensitivity, requiring no additional process, reducing Jhonson noise, and improving yield.

IR sensor and method for fabricating the same

Infrared sensor that can make a temperature compensation by itself, and method for compensating a temperature thereof, are disclosed. The infrared sensor preferably includes a substrate, a diaphragm formed on the substrate, and a first thermopile sensor formed on a region of the diaphragm for sensing an infrared radiation emitted from a measured object and infrared radiations emitted from regions other than the measured object. A second thermopile sensor is formed on a region of the diaphragm and connected to the first thermopile sensor for sensing the infrared radiations emitted from the regions other than the measured object. A housing protects a front face of the substrate including the first, and second thermopile sensors includes an infrared filter in the housing over the first and second thermopile sensors for transmission of infrared radiations, and a reflector reflects the infrared radiation emitted from the measured object toward the first thermopile sensor. The method for temperature compensation can include the steps of letting an infrared radiation from a measured object be directed to the first thermopile sensor and letting infrared radiations from regions other than the measured object be directed to the first and second thermopile sensors, respectively, sensing the infrared radiations in the first and second thermopile sensors directed thereto, and making a temperature compensation for the infrared radiations from regions other than the measured object using the first and second thermopile sensors to provide a temperature component of the measured object only.

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Kyonggi-do, South Korea

In Sik Kim