Samsung Electronics Co., Ltd.

Yonsei University

Other

Princeton Biomeditech Corporation

Republic of Korea (national Veterinary Research & Quarantine Service)

Republic of Korea

Princeton Biomeditech East, Inc.

In-Joong Kim

Chang-Ho Kim

In-Soo Cho

Ki-Yong Jang

Yi-Seok Joo

Ilgu Yun

Suh-Ha Hwang

Jae-Ku Oem

Song-Woo Ko

Soo-Jeong Kye

Nam-Kyu Shin

Young-Joon Ko

Kwang-Nyeong Lee

Je-Mo Kang

Bok-Kyung Ku

Soo-Hwan An

Ok-Kyung Kim

Bang-Hun Hyun

Hee-Jong Kim

Ki-Sang Kim

Hyun-Su Jun

Jong-Bum Kim

Il Gu Yun

Seung-Heong Lee

Min-Woung Choi

In-Soo 902-405 Shindong-A Apt Cho

Hee-Jeong Kim

Ki-Yong 101-102 Cheonggu Apt Jang

A plasma processing apparatus is provided. The plasma processing apparatus includes a chamber configured to perform a plasma process on a wafer, a viewport configured to transmit plasma light generated in the chamber, a rotation module coupled to the viewport to be rotatable around a rotation axis, and an OES (Optical Emission Spectroscopy) device which is coupled to the rotation module and configured to receive the plasma light, wherein the rotation module includes a first surface facing the viewport and a second surface facing the OES device, wherein the first surface is configured to block a part of the plasma light, and includes a first opening through which an inside of the rotation module is configured to be exposed to a part of the plasma light, and wherein the second surface includes a second opening configured to be in light communication with the first opening.

OES device, plasma processing apparatus including the same and method of fabricating semiconductor device

Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.

Tube-type lens, optical emission spectroscopy (OES) apparatus including the tube-type lens, plasma monitoring system including the OES apparatus, and method of manufacturing semiconductor device by using the plasma monitoring system

Disclosed is an apparatus for optical emission spectroscopy which includes a light measuring unit measuring light in a process chamber performing a plasma process on a substrate, a light analyzing unit receiving light collected from the light measuring unit to analyze a plasma state, a control unit receiving an output signal of the light analyzing unit to process the output signal, and a light collecting controller disposed between the process chamber and the light measuring unit so as to be combined with the light measuring unit. The light collecting controller controls the light collected to the light measuring unit.

Apparatus for optical emission spectroscopy and plasma treatment apparatus

A rapid immunoassay method and apparatus for detecting foot and mouth disease virus are disclosed. The method and test device permit pen-side testing of animals and provide test results within a relatively short time period. In a preferred embodiment, the method and apparatus provide a means for differentiating between FMDV-infected and FMDV-vaccinated animals.

Method and devices for rapid diagnosis of foot-and-mouth disease

Plasma processing methods of a semiconductor manufacturing apparatus which can minimize the amount of impurities adhered to the surface of a wafer, when a desired process using plasma is performed. According to the plasma processing methods of the semiconductor manufacturing apparatus, after the desired process is completed, the plasma generated over the wafer is diffused, and then the wafer is de-chucked.

Plasma processing method of semiconductor manufacturing apparatus

Growing community of inventors

Seoul, South Korea

In-Joong Kim