Skhynix Inc.

Korea University Research and Business Foundation

In Hwan Lee

Jin Soo Kim

Tae Hwan Kim

Chang Moon Lim

Myoung Soo Kim

Jun Taek Park

Jeong Su Park

Yong Dae Kim

Seo Min Kim

Tae Joong Ha

Byoung Hoon Lee

Yoon Suk Hyun

Sun Young Koo

Mi Jeong Lim

Byung Hoon Lee

Gyu Cheol Kim

The present disclosure relates to the structure of a micro light-emitting device and an alignment substrate. The light-emitting device according to one embodiment includes an inclined side surface having a three-dimensional shape. The inclined side surface is formed to protrude from one surface of the micro light-emitting device, has magnetism, and includes two different electrodes formed in one direction. In this case, among the two electrodes, one electrode may be formed on a mesa portion, and the other electrode may be formed on the inclined side surface.

Structure of micro light-emitting device and method of transferring micro light-emitting device

A reflective mask includes a first reflection layer disposed on a mask substrate, a first capping layer disposed on the first reflection layer, a second reflection pattern disposed on a portion of the first capping layer, and a phase shifter disposed between the second reflection pattern and the first capping layer to cause a phase difference between a first light reflecting from the first reflection layer and a second light reflecting from the second reflection pattern. Related methods are also provided.

Reflective mask and method of fabricating the same

A semiconductor device includes a cell mask pattern disposed in a cell region of a mask substrate and a vernier mask pattern disposed in a vernier region of the mask substrate. The vernier mask pattern includes a variable mask pattern portion to transfer a different shape of pattern depending on the magnitude of exposure energy.

Photomask and method for forming pattern of semiconductor device using the same

Growing community of inventors

Seoul, South Korea

In Hwan Lee