Samsung Electronics Co., Ltd.

Ilyoung Moon

Kiseok Lee

Chan-Sic Yoon

Jemin Park

Jun Ho Lee

Jung-Hoon Han

Jiseok Hong

Sooho Shin

Juik Lee

Kwangmin Kim

Hoin Lee

Bumseok Seo

A method of fabricating a semiconductor device includes providing a substrate, and forming an interlayered insulating layer on the substrate. The method includes forming a preliminary via hole in the interlayered insulating layer. The method includes forming a passivation spacer on an inner side surface of the preliminary via hole. The method includes forming a via hole using the passivation spacer as an etch mask. The method includes forming a conductive via in the via hole. The passivation spacer includes an insulating material different from an insulating material included in the interlayered insulating layer.

Semiconductor device including a passivation spacer and method of fabricating the same

A semiconductor device includes an alignment key on a substrate. The alignment key includes a first sub-alignment key pattern with a first conductive pattern, a second conductive pattern, and a capping dielectric pattern that are sequentially stacked on the substrate, an alignment key trench that penetrates at least a portion of the first sub-alignment key pattern, and a lower conductive pattern in the alignment key trench. The alignment key trench includes an upper trench that is provided in the capping dielectric pattern that has a first width, and a lower trench that extends downward from the upper trench and that has a second width less than the first width. The lower conductive pattern includes sidewall conductive patterns that are separately disposed on opposite sidewalls of the lower trench.

Semiconductor devices with alignment keys

Growing community of inventors

Yongin-si, South Korea

Ilyoung Moon