Asml Netherlands B.v.

Ilya Malakhovskiy

Petrus Mathijs Henricus Vosters

Mark Scholten

Martinus Josephus Theodorus Maria Cortenbach

A method for radiation beam welding of a first member to a second member of a cooling body for an electromagnetic actuator. The first member on a side thereof comprises a surface portion provided with a recess, which is delimited by a periphery, and wherein the second member comprises a substantially continuous first surface portion complementary to the surface portion of the first member in order to close off the recess, the second member being provided with a second surface portion opposite to the first surface portion. The method comprising arranging the first and second member such that the first surface portion engages with the surface portion of the first member; providing a radiation beam, directing the radiation beam towards the second surface portion such that the first and second member are welded together at the periphery of the recess.

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Eindhoven, Netherlands

Ilya Malakhovskiy