Canon Kabushiki Kaisha

Ilya L Rushkin

Weijun Liu

A method of coating a superstrate using a vacuum chuck containing ridges can comprise attaching the superstrate on the vacuum chuck; applying on the superstrate a liquid layer of a coating composition, the coating composition comprising a coating agent and a non-fluorinated solvent, wherein the non-fluorinated solvent has a boiling point of at least 165° C.; and solidifying the coating composition to form a solid coating layer. The material of the superstrate can have a thermal conductivity of not greater than 10 W/mK and the solid coating layer obtained after solidifying may comprise a smoothness value (SM) of not greater than 1%, the smoothness value being defined as SM=(C/C)×100%, with Cbeing a maximum roughness depth of the coating layer and Can average thickness of the coating layer over a length of 10 mm of the solid coating layer.

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Austin, TX, United States of America

Ilya L Rushkin