International Business Machines Corporation

Ilana Massarek

Bert Jan Offrein

Folkert Horst

Gian-Luca Bona

Roland Germann

Peter Bloechl

Huub L Salemink

An optical waveguide device is proposed which comprises a substrate, thereupon a lower cladding layer, thereupon an upper cladding layer and between said cladding layers a waveguide element. The influence of the substrate on the stress-induced birefringence of the optical waveguide device is reduced by modification of the substrate from underneath the waveguide element.

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Thalwil, Switzerland

Ilana Massarek