Nsk Corporation

Jeol Ltd.

Ikuya Nishimura

Toshikatsu Kaneyama

Toshikazu Honda

Mikio Naruse

Tomita Suzuki

Tsuyoshi Saitou

Yu Ishibashi

Daijiro Kano

Toshio Yuhta

Mamoru Tanaka

In the slide member, a recessed and projected pattern is formed in a slide surface of a mother member of the slide member allowed to slide in contact with a mating member, recessed portions of the recessed and projected pattern are filled with a lubricant, and the area ratio of the recessed portions is set in a range of 30 to 70% while the depth thereof is set for 10 .mu.m or less. The slide member is able to secure the lubricating property, wear resisting property and seize-up resisting property of the slide surface thereof with the recessed and projected pattern formed therein for a long period.

Wear resisting slide member

A specimen-driving apparatus used with an electron microscope. The apparatus can translate or tilt the specimen holder while preventing it from being damaged if a human operator performs any erroneous operation. The device has X, Y, Z translation directive devices, and a tilt directive device for permitting the operator to enter instructions for translating and tilting the specimen holder. A contact detector senses that the holder is in contact with the upper magnetic pole piece. A tilt condition decision portion determines whether the holder has tilted into the positive or negative domain. A Z domain decision portion determines whether the Z coordinate of the holder lies in the positive or negative domain. When the contact of the holder with the pole piece is detected, reverse movement of the holder along the Z-axis is inhibited. Also, reverse tilting movement of the holder is inhibited. When the holder comes out of contact with the pole piece, these reverse movements are permitted.

Specimen-driving apparatus for electron microscope which tilts and

Growing community of inventors

Hokkaido, Japan

Ikuya Nishimura