Yamatake-honeywell Co., Ltd.

Yamatake Honeywell

Ikuo Nishimoto

Shigeo Kimura

Yoshiyuki Ishikura

Takeshi Fukiura

Shoji Kamiunten

Takaaki Kuroiwa

Minoru Tanaka

Takashi Kurosawa

Tomoshige Yamamoto

The photoelectric distance sensor for sensing a distance to a sense object by irradiating light to the sense object, the photoelectric distance sensor comprises a light-irradiating section 3 for irradiating light to a sense object 6, a light-receiving section for receiving the reflected light from the sense object 6, an operating section for outputting the distance to the sense object 6 and the target value of received light amount fitted to the distance on the signal of the light-receiving section 4, and a light-irradiation-controlling section 17 for controlling a light irradiation amount on the target value of received light amount, and the photoelectric sensor is for controlling the light irradiation amount in order that the received light amount becomes the most fitted value according to the distance, and further the photoelectric sensor can enlarge the light irradiation amount according to the distance in near distances and can make measurement precision be improved.

Photoelectric distance sensor

In the photoelectric conversion method and apparatus applicable to displacement sensors irradiating light to objects and sensing the distances to the objects, distance-determining type photoelectric sensors etc., the method and apparatus arrange n (n&gt;2) light-receiving elements in a predetermined direction, and divide each photoelectric current I1, I2, . . . , In of each light-receiving element in predetermined ratios k1 to 1-k1, k2 to 1-k2, . . . , kn to 1-kn; and lead the divided photoelectric currents to the first and the second photoelectric current output terminal, and control the predetermined ratios k1, k2, . . . , kn in keeping such relationships as k1&gt;0.5&gt;kn and km.ltoreq.kp (p=m-1; m=2 to n), therefore the arbitrary positions on the light-receiving surface can be set in high sensibility, and high speed responsibility can be attained.

Photoelectric conversion method and apparatus thereof

In a capacitive pressure sensor and a method of manufacturing the same, first and second grooves are formed in one and the other surfaces of a substrate, respectively. A first sacrificial layer is embedded in the first groove. First insulating films are formed on the substrate in which the first sacrificial layer is formed. The first insulating films have a first film electrode stacked therebetween. A second sacrificial layer having a predetermined shape is stacked on the first insulating film. Second insulating films are formed on the first insulating film on which the second sacrificial layer is formed. The second insulating films have a second film electrode stacked therebetween. A pressure introducing hole is formed in the second groove formed in the other surface of the substrate to reach the first sacrificial layer. First and second hollow portions are formed by removing the first and second sacrificial layers.

Capacitive pressure sensor and method of manufacturing the same

According to a capacitive pressure sensor and a method of manufacturing the same, first and second grooves are formed in one and the other surfaces of a substrate, respectively. A sacrificial layer is embedded in the first groove. Insulating films are formed on the substrate, on which the sacrificial layer is formed, to sandwich an electrode. Etching is performed to form a pressure introducing hole through the substrate to reach the sacrificial layer. A hollow portion is formed by removing the sacrificial layer through the pressure introducing hole.

A microbridge flow sensor includes integral bridge portions and temperature-measuring resistive elements. The bridge portions are integrally formed above the right and left openings of a substrate, respectively. The temperature-measuring resistive elements are respectively formed on the surfaces of the bridge portions.

Microbridge flow sensor

An integrated circuit cooling device and a dew point hygrometer employing such a cooling device having a substrate with a peripheral region surrounding a central aperture, the substrate being overlaid by an insulating layer with a Peltier cooling device formed thereon. The Peltier device includes a plurality of alternate metallic segments of dissimilar metals arranged and joined to form first and second groups of corresponding junctions of which the first group is located over the peripheral region of the substrate and the second group is located over the central aperture.

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Kanagawa, Japan

Ikuo Nishimoto