Asahi Glass Company, Limited

Hitachi Chemical Company, Ltd.

Ikuo Matsukura

Naoko Shirota

Katsumi Suzuki

Shunsuke Yokotsuka

Toshihiko Nagamura

Jun Irisawa

Hidekazu Okamoto

Kazuya Oharu

Ko Aosaki

Kiyoshi Yamamoto

Eisuke Murotani

Hiromasa Yamamoto

Shinji Okada

Takenori Narita

Shunichiro Uchimura

Yuichiro Ishibashi

Hiroyuki Morishima

Aya Serita

Nana Tsushima

Reiko Kakita

A useful fluoropolymer excellent in transparency and durability to a short wavelength light (an ArF excimer laser having an irradiation wavelength of 193 nm and a F2 excimer laser having an irradiation wavelength of 157 nm) as e.g. a pellicle material, wherein a polymer (I) to be used for a pellicle membrane and/or an adhesive is a polymer essentially containing the following fluorine atom-containing unit (1), wherein a chain forming the polymer main chain comprises a carbon atom and an etheric oxygen atom, at least one carbon atom forming the main chain is a carbon atom forming a cyclic group, and at least one etheric oxygen atom forming the main chain is an oxygen atom forming no cyclic group.

Pellicle and novel fluoropolymer

To provide a spatial optical modulation element having a long life free from a deterioration of optical modulation characteristics even if a high power laser beam with an ultra-short pulse is used as a modulation drive light. A spatial optical modulation elementwherein disposed between a prismand an optical functional material layermade of an optical functional material with the refractive index changeable by light irradiation, is a low refractive index layermade of a transparent material with a refractive index lower than the refractive index of the dielectric. A spatial optical modulation method characterized in that using such a spatial optical modulation element, at the interface between the prism and the low refractive index layer, reflection of a to-be-modulated lightentering through the prism, is controlled by a modulation drive light

Spatial optical modulation element and spatial optical modulation method

A pellicle which is excellent in transmittance and durability against short wavelength light, and which can be used for photolithography by using e.g. a KrF excimer laser, is provided. A pellicle for exposure to a light having a wavelength of at most 200 nm, which comprises a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane and/or the adhesive comprises a polymer containing repeating units represented by the following formula (1): wherein Q represents a Cpolyfluoroalkylene group having a linear structure, or a group having at least one atom selected from hydrogen atoms and fluorine atoms in such a polyfluoroalkylene group substituted by a substituent comprising a polyfluoroalkyl group which may contain an ethereal oxygen atom, or the like, and X represents a hydrogen atom, a fluorine atom or a Cpolyfluoroalkyl group which may contain an ethereal oxygen atom.

Ultraviolet transmitting fluoropolymer and pellicle comprising said polymer

To provide a spatial optical modulation element having a long life free from a deterioration of optical modulation characteristics even if a high power laser beam with an ultra-short pulse is used as a modulation drive light, and having a high response speed when e.g. a light having a wavelength of 1.55 &#x3bc;m is used. A spatial optical modulation element wherein disposed between a prismand an optical functional material layermade of an optical functional material with the complex index of refraction changeable by light irradiation, is a low refractive index layermade of a transparent material with a refractive index lower than the refractive index of the prism, and carbon nanotubes are used as the optical function material.

A pellicle is used for a photolithographic patterning process using a light having a wavelength of from 100 to 200 nm. The pellicle contains a pellicle membrane containing (A) a substantially linear fluoropolymer which has an alicyclic structure in its main chain, the main chain being a chain of carbon atoms, and the fluropolymer satisfying the following requirements (1) the carbon atoms in the main chain of the fluoropolymer contain a carbon atom having at least one hydrogen atom bonded thereto and a carbon atom having no hydrogen atom bonded thereto; and (2) in the measurement of a high resolution proton magnetic resonance spectrum of the fluoropolymer, a number of hydrogen atoms based on signals appearing on the higher magnetic field side higher than 2.8 ppm, is at most 6 mol % based on a total number of hydrogen atoms.

Pellicle

An optical waveguide provided on a substrate, which comprises a core for transmitting light and a clad formed around the core, wherein the clad is made of a fluorinated alicyclic structure-containing polymer having functional groups.

Optical waveguide

A fluorine-containing polymer composition comprising a fluorine-containing solvent of the formula R &mdash;O&mdash;R wherein R is a C linear or branched polyfluoroalkyl group which may have an ether bond, and R is a C linear or branched alkyl group, and a fluorine-containing amorphous polymer having a fluorine-containing ring structure in its main chain, dissolved in the solvent.

Fluorine-containing polymer composition

A fluorine-containing polymer composition comprising a fluorine-containing solvent of the formula R,&mdash;O&mdash;R,wherein R,is a C,linear or branched polyfluoroalkyl group which may have an ether bond, and R,is a C,linear or branched alkyl group, and a fluorine-containing amorphous polymer having a fluorine-containing ring structure in its main chain, dissolved in the solvent.

Fluorine-containing resin composition

A low dielectric resin composition comprising the following components (a) and (b), and the dielectric constant of a coating film formed by this composition being at most 3:

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Yokohama, Japan

Ikuo Matsukura